Epitaxial (100)-oriented Mo/V superlattice grown on MgO(100) by dcMS and HiPIMS

Shayestehaminzadeh, S.; Magnússon, Rögnvaldur Líndal; Gíslason, H. P.; Ólafsson, S.

doi:10.1016/j.tsf.2013.08.094

Cited by 1 publication

(1 citation statement)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In the course of the past 15 years, the highly ionized fluxes generated by HiPIMS have been used to grow dense and smooth films, engineer their microstructure and the film-substrate interface and control their phase composition and other functional properties [54,55,57]. Less work has been done on utilizing the highly ionized fluxes for understanding film nucleation and growth on a fundamental level with the exception of sporadic attempts to study structure formation in transition metal oxides [59], growth evolution in transition metal nitrides [60][61][62][63] and microstructural evolution during epitaxial film growth [64].…”

Section: Strategies For Generation Of Highly Ionized and Pulsed Vapoumentioning

confidence: 99%

Atomistic view on thin film nucleation and growth by using highly ionized and pulsed vapour fluxes

Sarakinos

Magnfält

Elofsson

et al. 2014

Surface and Coatings Technology

View full text Add to dashboard Cite

We present a brief review on the use of ionized and pulsed vapour fluxes, primarily generated by high power impulse magnetron sputtering (HiPIMS) discharges, as tools to gain atomistic understanding on film nucleation and growth. Two case studies are considered; the first case study concerns stress generation in polycrystalline films. It is highlighted that by using vapour fluxes of well-controlled ion content and ion energy and by studying the film microstructure and intrinsic stresses one can obtain experimental evidence for stress generation by insertion of film forming species in the grain boundaries. In the second case study it is discussed how the use of pulsed vapour fluxes with well controlled time domain can facilitate understanding of growth dynamics and microstructural evolution in thin films grown in three-dimensional (i.e., Volmer-Weber) fashion. Broader implications of the described research strategies for the surface science and surface engineering communities are highlighted and discussed.2

show abstract