1994
DOI: 10.1063/1.356440
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Epitaxial growth in large-lattice-mismatch systems

Abstract: Epitaxial growth in the TiN/Si and TiN/GaAs metal-semiconductor systems with a large lattice mismatch was investigated. The orientation relationships have been found to be (OJ)l)TiN]] JOOl)Si for TiN growth on Si(OO1) and [OOl]TiN]] [llO]GaAs and [ 1 lO]TiN]] [ 1 lO]GaAs for TiN growth on GaAs ( 001) . The epitaxial growth is characterized by domain epitaxial orientation relationships with m lattice constants of epilayer matching with n of the substrate and with a small residual domain mismatch present in the … Show more

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Cited by 155 publications
(84 citation statements)
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“…26 When the lattice mismatch is large as in the case between Si and BT, the growth with supercell matching becomes favorable. 27 The XRD data measured on the other samples show the same epitaxial relationships but the crystalline qualities are different. Fig.…”
mentioning
confidence: 74%
“…26 When the lattice mismatch is large as in the case between Si and BT, the growth with supercell matching becomes favorable. 27 The XRD data measured on the other samples show the same epitaxial relationships but the crystalline qualities are different. Fig.…”
mentioning
confidence: 74%
“…Bulk ScN crystals have also been proposed as a substrate for gallium nitride, due to its small lattice constant mismatch, -0.1% [6]. Furthermore, epitaxial growth of TiN was investigated on Si and GaAs substrate [7]. Both orientation relationships of TiN In addition, titanium nitride is a major industrial material because of its excellent properties, including abrasive wear resistance, good lubricating characteristics and low diffusivity.…”
Section: Introductionmentioning
confidence: 99%
“…Usually, in epitaxial growth, the lattice mismatch induced strain energy as well as the interfacial or chemical energy determine the orientation relationship and the epitaxial layer always orients itself in such a way that the lattice mismatch is reduced and the anisotropy interfacial energy is lowered [9]. The lattice constant of two kinds of particles could be estimated from their corresponding SAD pattern.…”
Section: Resultsmentioning
confidence: 99%