2020
DOI: 10.2109/jcersj2.20027
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Epitaxial growth mechanism of Pb(Zr,Ti)O<sub>3</sub> thin films on SrTiO<sub>3</sub> by chemical solution deposition via self-organized seed layer

Abstract: Using scanning transmission electron microscopy and electron energy loss spectroscopy, we have elucidated the local structure and the crystallization mechanism of amorphous phase PbZr x Ti 1¹x O 3 (PZT) (x = 0.3) thin films deposited on SrTiO 3 (STO) (001) single-crystal substrates by chemical solution deposition. The amorphous phase involves the short-range order of (Ti/Zr)O 6 octahedra and PbO, and then, they are connected with the residual carbon. During the pyrolysis process, the first unit cells of the fi… Show more

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Cited by 6 publications
(3 citation statements)
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“…The presence of voids near the Pt–PZT interface inhibits mass transfer, reducing the nucleation and growth of Pe grains. In addition, Kiguchi et al 77 have shown that the presence of carbon stimulates PZT epitaxial growth. Thus, the presence of voids and carbon residuals at the Pt surface hinders nucleation and leads to the formation of large crystals.…”
Section: Discussionmentioning
confidence: 99%
“…The presence of voids near the Pt–PZT interface inhibits mass transfer, reducing the nucleation and growth of Pe grains. In addition, Kiguchi et al 77 have shown that the presence of carbon stimulates PZT epitaxial growth. Thus, the presence of voids and carbon residuals at the Pt surface hinders nucleation and leads to the formation of large crystals.…”
Section: Discussionmentioning
confidence: 99%
“…Our results suggest that the ferroelectric domains, irrespective of the underlying mechanism responsible for their stability, are clamped in the volume of the layer, possibly by defects. Although the growth of PZT thin films by soft chemical methods like sol-gel is not very common, despite the advantage of it being an affordable synthesis process to coat large areas, the presence of nanoscale cavities has been reported recently in similar films grown by metalloorganic decomposition [31]. The low magnification STEM-HAADF images in Figure 1b and in Figure 8 show that films do have a large amount of such nanometer-size defects, the aforementioned cavities, which could favor the clamping of domains created by the flexoelectric effect, without the need to reach the bottom electrode.…”
Section: Discussionmentioning
confidence: 99%
“…11,12) The widespread usage of MLCCs more or less relies on the defect chemistry [13][14][15][16][17][18][19][20][21] established for SrTiO 3 and BaTiO 3 . At present, intensive efforts [20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37] have been made to explore nanostructured materials and devices using BaTiO 3 -based materials, whereas the deep understanding of defects is far from complete for Pb(Zr, Ti)O 3 , [38][39][40][41][42][43][44][45][46][47][48][49][50][51][52][53] (Bi, Na)TiO 3 , [54][55][56][57]…”
Section: Introductionmentioning
confidence: 99%