“…Although the structural quality of films of functional oxides grown on semiconductor substrates is far from the quality of these materials grown on appropriate oxide substrates, significant improvements have been made over the last seven decades (and especially in the last two decades) because oxides were first epitaxially integrated with semiconductors 296,297 . Several routes now exist for the epitaxial integration of functional oxides with semiconductors including (001) Si, 196,204,205,210,212–215,225,226,298–306 (001) Ge, 198,204,307,308 (001) GaAs, 304,309,310 (001) InP, 311,312 and (0001) GaN 226,313–315 . Using these routes a multitude of functional oxides, with conducting top and bottom electrodes when desired, have been epitaxially integrated with semiconductor materials 196,198,204,205,225,226,298,299,301,304,307–309,313,314,316–326 .…”