2001
DOI: 10.1002/1521-3951(200109)227:1<1::aid-pssb1>3.0.co;2-q
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Epitaxial Lateral Overgrowth of GaN

Abstract: Since there is no GaN bulk single crystal available, the whole technological development of GaN based devices relies on heteroepitaxy. Numerous defects are generated in the heteroepitaxy of GaN on sapphire or 6H‐SiC, mainly threading dislocations (TDs). Three types of TDs are currently observed, a type (with Burgers vector 1/3〈$11 \bar{2}0$〉); c type (with 〈0001〉) and mixed a+c (1/3〈$11 \bar{2}3$〉). The Epitaxial Lateral Overgrowth (ELO) technology produces high quality GaN with TD densities in the mid 106 cm—… Show more

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Cited by 191 publications
(98 citation statements)
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References 153 publications
(190 reference statements)
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“…Since EDX detects mostly carbon in these rods, the similarity to carbon nanotubes growth on metal covered substrates cannot be neglected, as discussed below. XRD under grazing incidence geometry was performed on these balloon structures before and after annealing under NH 3 . An evolution of the XRD diagram in the 30-44 region is presented in Fig.…”
Section: Inset)mentioning
confidence: 99%
See 1 more Smart Citation
“…Since EDX detects mostly carbon in these rods, the similarity to carbon nanotubes growth on metal covered substrates cannot be neglected, as discussed below. XRD under grazing incidence geometry was performed on these balloon structures before and after annealing under NH 3 . An evolution of the XRD diagram in the 30-44 region is presented in Fig.…”
Section: Inset)mentioning
confidence: 99%
“…Great effort has been devoted to develop the (Ga, Al, In)N family, to improve the crystal quality and, consequently, improve the devices' performances [3]. Many of these improvements are closely related to the substrate and the growth/ regrowth conditions [1][2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…In III-N technology, SAG has been employed mostly in epitaxial lateral overgrowth (ELOG) methods which were developed to reduce threading dislocations in heteroepitaxial growth [55][56][57]. In contrast with ion implantation, the extensively characterized [58][59][60][61][62] defect-free GaN layers grown by lateral epitaxial over-growth can provide a more beneficial solution to realize LHJ structures [63].…”
Section: Selective Area Growth As a Methods To Realize A Lateral Pn-jumentioning
confidence: 99%
“…On the other hand Narayanan et al [72] in their studies stated that TDs come from the defects at the sapphire/GaN boundary. Different methods are used to lower the TD density, such as epitaxial lateral overgrowth, pendeo epitaxy [73], applying high-temperature AlN buffer layers [67] or transitional metal nitrides interlayers [74]. These techniques allowed to lower the dislocation density by a few orders of magnitude to ~10 6 -10 7 cm -2 .…”
Section: Threading Dislocationsmentioning
confidence: 99%