2023
DOI: 10.1088/1361-6641/acb3f0
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Epitaxial lift-off method for GaAs solar cells with high Al content AlGaAs window layer

Abstract: The epitaxial GaAs substrate lift-off (ELO) technique is widely used to produce thin film III-V semiconductor optoelectronic devices. However, the HF acid used in this process forbids the incorporation of active AlGaAs device layers with high Al content due to its selective etching. In this work, a new ELO method is presented, which allows for the protection of AlGaAs layers against the HF acid attack. The method is used here to prepare thin film GaAs solar cells containing Al0.85Ga0.15As window layer. We empl… Show more

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Cited by 5 publications
(4 citation statements)
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“…After growth, a back contact of AuGe/Ni/Au is deposited, followed by electrochemical copper deposition and attachment of the structure to a Kapton polyimide. The substrate is then removed by etching [ 10 ]. Layers 2–4 (see Fig.…”
Section: Resultsmentioning
confidence: 99%
See 2 more Smart Citations
“…After growth, a back contact of AuGe/Ni/Au is deposited, followed by electrochemical copper deposition and attachment of the structure to a Kapton polyimide. The substrate is then removed by etching [ 10 ]. Layers 2–4 (see Fig.…”
Section: Resultsmentioning
confidence: 99%
“…A thin-film triple-junction solar cell was obtained by GaAs substrate etching. The etching procedure, including back surface metallization with metal contacts, electrochemical deposition of a 20-μm-thick Cu, and securing the cell to a polyimide sheet, is described elsewhere in [ 10 ].…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…Other approaches, such as wafer bonding, ELO, and microtransfer printing are more promising. They can reproducibly deliver large-scale GaAs films of sufficient quality on foreign substrates, e.g., for applications in high-frequency amplification and optoelectronics.…”
Section: Introductionmentioning
confidence: 99%