Epitaxy of oxide and nitride thin films grown by magnetron sputtering

Abstract

The need for electronic devices with new functionalities has caused research to move in a way to design and utilize materials with high-performance thermoelectricity, widely used in batteries, sensors, and electronic devices. Two-dimensional materials (2D) with unique structures and remarkable properties have been identified to fabricate oxide heteroepitaxy. The PrefaceThis licentiate thesis is part of my Ph.D. studies in the Energy Materials unit in the Thin Film