2014
DOI: 10.5194/jsss-3-187-2014
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Equivalent circuit models of two-layer flexure beams with excitation by temperature, humidity, pressure, piezoelectric or piezomagnetic interactions

Abstract: Two-layer flexure beams often serve as basic transducers in actuators and sensors. In this paper a generalized description of their stimuli-influenced mechanical behavior is derived. For small deflection angles this description includes a multi-port circuit or network representation with lumped elements for a beam part of finite length. A number of coupled finite beam parts model the dynamic behavior including the first natural frequencies of the beam. For piezoelectric and piezomagnetic interactions, reversib… Show more

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Cited by 18 publications
(15 citation statements)
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“…However, in process control 70 % of all sensors are used as threshold switches and in building monitoring more than 90 %. In Bellmann et al (2015), a novel approach for a non-powered humidity threshold switch based on the BIZEPS (binary zeropower sensor) principle was proposed (see also Frank et al, 2012;Rangelow et al, 2009;Rittersma, 2002). With this principle, the energy is taken directly from the measured variable.…”
Section: Motivationmentioning
confidence: 99%
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“…However, in process control 70 % of all sensors are used as threshold switches and in building monitoring more than 90 %. In Bellmann et al (2015), a novel approach for a non-powered humidity threshold switch based on the BIZEPS (binary zeropower sensor) principle was proposed (see also Frank et al, 2012;Rangelow et al, 2009;Rittersma, 2002). With this principle, the energy is taken directly from the measured variable.…”
Section: Motivationmentioning
confidence: 99%
“…To calculate the deflection as a function of the hydrogel pattern, a simple mechanical model is used based on the beam theory for monomorph and bimorph beams (Marschner et al, 2014). Figure 2 shows the setup of the sensor and the corresponding mechanical model.…”
Section: Model Without Axial Forcesmentioning
confidence: 99%
“…As shown in Reference [31], the effect of a bimorph bending element can be considered as a conventional monomorph bending element with an additionally acting internal moment source (affecting the bending behavior), as well as an internally generated in-plane force, due to the effective thermal length expansion.…”
Section: Deflection Of a Bending Plate Due To The Bimorph Effectmentioning
confidence: 99%
“…In the case of silicon plates, both the pre-deflection and the axial pre-stress can be achieved by depositing an SiO 2 layer in the center of the plate. SiO 2 has a coefficient of thermal expansion (5.6 × 10 −7 K −1 ) that is much smaller than that one of Si (2.3 × 10 −6 K −1 ) [31]. After cooling down the structure from higher temperatures to room temperature, both the targeted pre-deflection and the compressive stress in the plane are established (Figure 13).…”
Section: Set-upmentioning
confidence: 99%
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