2024
DOI: 10.1088/1361-6439/ad63b4
|View full text |Cite
|
Sign up to set email alerts
|

Equivalent electrical circuits for electroacoustic MEMS design: a review

Romain Liechti

Abstract: At the era of powerful computers, it’s tempting to employ finite element models early in the design phase of a device. However, especially for MEMS devices, the dimensional ratios and short wavelengths compared to the device’s dimensions, along with the involvement of multiple physics, can necessitate complex and computationally intensive models, making them impractical for optimization processes. Hence, reduced order models, like the lumped element model, are often preferred as they accurately represent compl… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 130 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?