“…The dependence of the sputtering yield on the incidence angle, Y(h), and distribution of the local ion incidence angles for the rough surface, f(h), found either experimentally or with a particular model of the surface relief are usually considered as a basis for relevant computer modeling [31]. Both the local surface gradient and effect of surface curvature should be considered in calculations related to the sputtering of a surface with a nanosized relief.…”