In crystalline silicon, above-bandgap illumination can transform defects into strong recombination centers, degrading minority-carrier lifetime and solar cell efficiency. This light-induced degradation (LID) is due primarily to boronoxygen and iron-boron defects, and can be reversed using thermal treatments that are distinctly different for each type of defect. Combining illumination and thermal treatment, we have designed an accelerated light-induced degradation (ALID) cycle that, within minutes, transforms defects into the distinct states needed to isolate individual contributions from boron-oxygen dimers (BO 2i ) and interstitial iron (Fe i ). In this cycle, the concentrations of BO 2i and Fe i are determined using surface photovoltage (SPV) diffusion length measurement. The ALID cycle uses reversible defect reactions and gives very good repeatability of wafer-scale mapping of BO 2i and Fe i in photovoltaic (PV) wafers and final solar cells.