ECS J. Solid State Sci. Technol.
 2014
DOI: 10.1149/2.0081502jss
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Erratum: Investigation of Argon Plasma Damage on Ultra Low-κ Dielectrics [ECS J. Solid State Sci. Technol., 4, N3023 (2015)]

C. Kubasch
1
,
Teju Tunde Olawumi
2
,
H. Ruelke
3
et al.
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