Erratum: “The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency” [J. Appl. Phys. 131, 153301 (2022)]

Wu, Hao; Chen, Zhaoyu; Yu, Shimin; Wang, Qixuan; Li, Xiandi; Jiang, Wei; Zhang, Ya

doi:10.1063/5.0096580

Journal of Applied Physics

2022

DOI: 10.1063/5.0096580

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Erratum: “The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency” [J. Appl. Phys. 131, 153301 (2022)]

Hao Wu

Zhaoyu Chen

Shimin Yu

et al.

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Erratum: “The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency” [J. Appl. Phys. 131, 153301 (2022)]

This publication either has no citations yet, or we are still processing them

See others like this or search for similar articles

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