This paper studies the process of relaxation of a polymer after swelling in supercritical carbon dioxide. Polyhexafluoropropylene (PHFP) was chosen as the object for investigation. The relaxation process was monitored by a change of the permeability coefficients for a number of gases. Thin polymeric films of PHFP were modified by different treatments: drying to a constant weight, annealing at a temperature slightly higher than the glass-transition temperature, and swelling in supercritical carbon dioxide. The permeability coefficients of six gases, He, H 2 , O 2 N 2, CO 2 , and CH 4 , were measured after each stage of the treatment. It was shown that the permeability coefficients in the films were increased by 2.4 times for He, 3.6 for H 2 , 5.9 for O 2 , 8.1 for N 2 , 6.7 for CO 2 , and 10.9 for methane. The permeability coefficients of the same gases were measured 50 days later after swelling in supercritical carbon dioxide. A decrease in the permeability coefficient demonstrated that the relaxation process had taken place. Nevertheless, the values exceeded the initial ones for annealed samples by 2.0 times for He, 2.4 for H 2 , 1.8 for O 2 , 1.7 for N 2 , 1.7 for CO 2 , and 1.3 for methane.