Erratum: Yamazaki et al. Editing DNA Methylation in Mammalian Embryos. Int. J. Mol. Sci. 2020, 21, 637

Abstract

The authors wish to make the following corrections to our previously published paper [...]

Relation between crystallinity and constituent distribution of an IGZO thin film

“…3) Kamiya et al suggested a transparent amorphous OS 4) and claimed that an amorphous structure is ideal, 5,6) which is different from the idea of our crystalline IGZO. We discovered c-axis-aligned crystalline IGZO (CAAC-IGZO) [7][8][9] and nanocrystalline IGZO (nc-IGZO) [10][11][12][13] as an intermediate state between single crystal IGZO 1,14,15) and amorphous IGZO. Both CAAC-IGZO and nc-IGZO include fine crystalline clusters.…”

“…To achieve a CAAC structure, a substrate must be heated at a certain temperature during the IGZO deposition. 8,17) Therefore, nc-IGZO, which can be deposited at RT, is considered advantageous in terms of productivity. Although the crystallinity of CAAC-IGZO has generally been verified as in some papers from other research groups, 19) the crystallinity of nc-IGZO has not been studied closely.…”