Error analysis and measurement methods of curved optical element surface defects dark-field imaging inspection system based on multi-axis kinematics

Three-dimensional dark-field confocal microscopy (DFCM) using annular illumination and complementary detection apertures is capable of detecting subsurface defects in ultra-precision optical components. In this study, a DFCM tuning algorithm for large apertures is proposed based on the sinc2 tuning model. This algorithm provides a reliable and theoretically accurate method for extracting the axial position during the measurement of subsurface defects. The rationality and accuracy of this method are verified through simulations and experimental results.

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Error analysis and measurement methods of curved optical element surface defects dark-field imaging inspection system based on multi-axis kinematics

Cited by 3 publications

References 12 publications

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A testing and data processing method of projectile explosion position based on three UAVs’ visual spatial constrain mechanism

High-SNR 3D dark-field microscopy based on orbital angular momentum extraction

Axial peak extraction in the measurement of subsurface structures with annular illumination confocal microscopy

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