Epitaxial lift-off (ELO) is a process which allows for the separation of a single crystalline
III/V thin film or device from the substrate it was deposited on. This process is based on
the selective etching of an intermediate AlAs release layer in an aqueous HF solution.
The lateral etch rate of the AlAs release layer through a narrow crevice in the
weight-induced epitaxial lift-off (WI-ELO) process is much larger than observed for
unobstructed planar AlAs layers. It is possible that this increase in etch rate is
caused by the tensile strain induced upon the AlAs layer in the WI-ELO setup. In
order to verify this assumption, planar AlAs layers, subjected to a controlled
curvature, were etched in HF solutions and their etch duration was measured. The
applied curvature reduced the already present compressive strain due to lattice
mismatch. For large applied bending radii no change in etch rate was observed,
because the induced bending is smaller than the already present bending due to
the lattice mismatch. Further bending induces a total compressive strain from
−0.126% to
−0.11%, resulting in an etch rate variation from 0.054 up to
0.066 mm h−1. Measurements on AlAs layers experiencing a tensile strain of
+0.286% showed much
higher etch rates of 0.134 mm h−1.
The present results obtained on etching experiments in the lateral plane are extrapolated
to the perpendicular direction so that a combination with the data from previous work
becomes feasible. This results in a better microscopic picture of the etch front in
the WI-ELO process. It is found that the force exerted by the weight can be
projected on an area, limited by the sample width and a depth of approximately
6 µm.