ESD Susceptibility of Submicron Air Gaps

Wolf, Heinrich; Gieser, H.; Bonfert, Detlef; Hauser, Markus

doi:10.1016/j.microrel.2006.07.039

Cited by 3 publications

(2 citation statements)

References 2 publications

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“…Because the minimal electric field strength required for a field emission in air is known to be 10 9 V/m [10], the electrical field strength of 6.5 × 10 13 V/m induced by an ESD stress of 0.5 kV is large enough to produce a field emission in the air gap. Furthermore, Wolf et al investigated the ESD susceptibility of submicrometer air gaps with a width in the range of 280-330 nm by applying a high-voltage pulse which is similar to HBM ESD stress and suggested that an onset voltage for field emission is 220-280 V [12]. These results indicate that GaN LEDs with an air gap designed for field emission can be effectively protected from high positive-and negative-voltage ESD stresses because the high-voltage ESD-induced current can flow in the air gap, bypassing the active MQW region of GaN LEDs.…”

Section: Methodsmentioning

confidence: 99%

Improvement of Electrostatic Discharge Characteristics and Optical Properties of GaN-Based Light-Emitting Diodes

Park

2009

IEEE Electron Device Lett.

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To improve the positive-and negative-voltage electrostatic discharge (ESD) characteristics of GaN light-emitting diodes (LEDs), an air gap was introduced as an ESD protection structure in an Al film on the bottom side of a sapphire substrate. The negative-voltage ESD characteristic of GaN LEDs with an air gap was remarkably improved from −0.3 to −4 kV. The degradation of electroluminescent intensity of GaN LEDs, which was caused by ESD stress, was also suppressed by an air gap in GaN LEDs. An ESD-stress-induced current is believed to flow in an air gap to protect the multiquantum well of GaN LEDs.

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Section: Methodsmentioning

confidence: 99%

Improvement of Electrostatic Discharge Characteristics and Optical Properties of GaN-Based Light-Emitting Diodes

Park

2009

IEEE Electron Device Lett.

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“…Understanding the mechanism responsible for the electrical breakdown in air at small gaps is of interest not only to the plasma community [5][6][7][8][9][10], but also to the microelectronics industry [11][12][13][14]. Although, studies of the breakdown characteristics in compressed gases are reported in a number of publications [15][16][17][18][19], many aspects are insufficiently explored, still representing an active area of research.…”

Section: Introductionmentioning

confidence: 99%

The breakdown voltage characteristics of compressed ambient air microdischarges from direct current to 10.2 MHz

Klas

Moravský

Matejčík

et al. 2017

Plasma Sources Sci. Technol.

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This paper presents the results of the experimental and simulation studies of the breakdown characteristics of microdischarges in compressed ambient air under the influence of static and timevarying electric fields, up to radio-frequencies. The measurements were performed for sphere to plane geometry of the electrodes separated from 5 μm to 100 μm, within the pressure range 760 Torr to 3800 Torr. For gaps of the order of a few micrometers, it is not possible to properly obtain the left-hand side of the Paschen curve; and the Townsend mechanism is no longer suitable. Deviations are also observable in the direction of lower breakdown potential that appear at the right of the minimum of the direct-current breakdown voltage curves indicating that accumulated space charge plays an important role in enhanced field emission. The experimental data agree well with the simulation results obtained by a one-dimensional particle-in-cell/Monte Carlo collision code including field emission effects. Their fit to a simple formula describing the dependence of the breakdown voltage on the product of the pressure and the gap size is suggested. Based on the measured breakdown voltage curves, the effective secondary electron emission coefficients have been determined. This work especially focuses on the effect of the electrode surface degradation on the breakdown characteristics at high pressure and high frequency. It is observed that in the case of direct-current and low frequency discharges, there is no significant influence of the electrode surface degradation on the breakdown voltage and the effective yields. However, for higher frequencies, the breakdown voltages are lower and the effective yields are much higher after degradation. The obtained results represent our attempt to derive a preliminary understanding of the governing breakdown processes in compressed air microdischarges.

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