Establishing traceability for on-wafer S-parameter measurements of membrane technology devices up to 110 GHz

Arz, Uwe; Zinal, Sherko; Probst, T.; Hechtfischer, G.; Schmuckle, F.J.; Heinrich, W.

doi:10.1109/arftg.2017.8255874

Cited by 13 publications

(14 citation statements)

References 12 publications

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“…Fig. 5 shows preliminary uncertainty estimates for the multiline TRL-corrected measurements, based on the work reported in [7]. It is clear from Fig.…”

Section: B Observationsmentioning

confidence: 90%

An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz

Clarke

Shang

Ridler

et al. 2020

2020 94th ARFTG Microwave Measurement Symposium (ARFTG)

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The development, modelling and characterization of millimeter-wave semiconductor devices calls for accurate and reproducible on-wafer measurements. We report on an interlaboratory study involving on-wafer S-parameter measurements in the 140 GHz to 220 GHz band, conducted by three well-established measurement laboratories. The measurements can be used to form typical reproducibility limits for these measurements when conducted in different laboratories using different equipment and calibration methods.

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“…Fig. 5 shows preliminary uncertainty estimates for the multiline TRL-corrected measurements, based on the work reported in [7]. It is clear from Fig.…”

Section: B Observationsmentioning

confidence: 90%

An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz

Clarke

Shang

Ridler

et al. 2020

2020 94th ARFTG Microwave Measurement Symposium (ARFTG)

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“…Nowadays numerical full-wave electro-magnetic simulators are available that are capable of accounting for parasitic effects like dispersion, radiation and conductor loss effects (Schmückle et al, 2011). Nevertheless analytical transmission line models are required for developing reliable uncertainty budgets for calibration purposes (Arz et al, 2017) and moreover have fundamental importance to microwave design. Such an analytical model was presented in the early nineties (Heinrich, 1993).…”

Section: Introductionmentioning

confidence: 99%

“…This paper shows the application of a roughness model (Gold and Helmreich, 2012) that is capable of accounting for impact on loss and delay of transmission lines to the contemplated CPW model. This new extension finally allows for precisely describing properties of CPWs including all known parasitic effects.…”

Section: Introductionmentioning

confidence: 99%

High-Frequency Modeling of Coplanar Waveguides Including Surface Roughness

et al. 2019

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Abstract. An existing analytical transmission line model to describe propagation properties of coplanar waveguides including dispersion and radiation effects was extended to take into account surface roughness of conductor traces. The influence of parasitics is successively included in the simulation and compared to measurements. The device under test (DUT) was fabricated on an Al2O3 wafer. A metal and ceramic chuck was utilized during measurements up to 120 GHz. The extended model is then capable of precisely predicting propagation properties in a wide frequency range and can now be used for calibration purposes like the development of uncertainty budgets.

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“…In [3], the use of method-of-moments based EM modelling of short-open-load (SOL) standard definitions resulted in a significant enhancement of calibration accuracy in comparison to the classical lumped model. Recently, [4] reported progress towards establishing traceability for a planar environment together with detailed uncertainty budgets.…”

Section: Introductionmentioning

confidence: 99%

Parameterization Models for Traceable Characterization of Planar CPW SOL Calibration Standards

Mubarak

Mascolo

Rietveld

et al. 2018

2018 Conference on Precision Electromagnetic Measurements (CPEM 2018)

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Methods for traceable characterization and uncertainty evaluation of planar 1-port CPW short-open-load (SOL) devices are developed. The agreement of modelling and verification measurement results greatly supports the application of the proposed parameterization models and used FEM-based EM modelling of CPW structures for traceable characterization of planar CPW-based SOL devices in the frequency range between a few kHz up to 50 GHz.

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Establishing traceability for on-wafer S-parameter measurements of membrane technology devices up to 110 GHz

Cited by 13 publications

References 12 publications

An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz

An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz

High-Frequency Modeling of Coplanar Waveguides Including Surface Roughness

Parameterization Models for Traceable Characterization of Planar CPW SOL Calibration Standards

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