The measurement of oxygen partial pressure in nitriding and nitrocarburising atmospheres by using the oxygen probe on the basis of solid state electrolytes has been approved for the in situ determination of the process parameters such as nitriding, oxidising and carburising potentials respectively. The oxygen can be used as a reactant as well as an indicator for the control of the parameters for nitriding and nitrocarburising processes. Process control on the basis of in situ probes provides a more precise and flexible approach to meet the demands made on surface layers. It can prevent disturbances caused by uncontrolled external oxygen and facilitates a rational gas regime, thus contributing to process and product optimisation as well as quality.