Abstract�Inelastic electron tunneling spectroscopy is used to investigate the adsorption of dimethyldimethoxysilane, dimethyldiethoxysilane, and dimethylvinylethoxy silane on alumina at the monolayer level. Data obtained indicate that different adsorbed layers are produced when the silanes are introduced onto the oxide surface from solution or as a vapor. Silanes introduced in the same way onto different types of oxides suggest that alumina morphology also affects the adsorbed configuration.