Estimation of deflections by interferometry in a cantilever array and its optimization based on a two-scale model

Abstract

In this paper, our attention is focused on a two scale model based algorithm for deflection estimation of array of Atomic force microscopes (AFM) in quasi static regime by interferometry. In a previous work, an algorithm based on three measurements by cantilever was introduced to compute their displacements in quasi-static regime. Here, we propose an improvement so that two measurements only are required. This is based on a published two-scale model of such array. Numerical simulation results of topographic scan by an array of AFMs on a sample surface are reported. The simulations are carried out with a model calibrated from a device which design optimization is also discussed here.

A Multi-Featured Factor Analysis and Dynamic Window Rectification Method for Remaining Useful Life Prognosis of Rolling Bearings

“…Consideration of the size of the sliding window is essential. In the paper, we analyzed the length of sliding windows on two public datasets [26,27]. According to different window lengths, health indicators are divided into multiple subsequences.…”