Estimation of Material Damping Coefficients of AlN for Film Bulk Acoustic Wave Resonator

Nor, N. I. M.; Khalid, N.; Osman, Rozana Aina Maulat; Sauli, Zaliman

doi:10.4028/www.scientific.net/msf.819.209

Cited by 3 publications

(2 citation statements)

References 16 publications

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“…Particularly, the material loss incurred during the actual fabrication is notably higher compared to the assumed material losses in the simulation, resulting in a decline in various aspects of the filter's performance. In general, the damping present in the FBAR significantly affects its Q-factor [39,40], which, in turn, greatly influences the in-band characteristics of the filter [30,41,42]. A higher Q-factor generally results in better in-band characteristics for the filter [30,41,42].…”

Section: Resultsmentioning

confidence: 99%

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Gao,

Zheng,

et al. 2024

Sensors

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Film bulk acoustic-wave resonators (FBARs) are widely utilized in the field of radio frequency (RF) filters due to their excellent performance, such as high operation frequency and high quality. In this paper, we present the design, fabrication, and characterization of an FBAR filter for the 3.0 GHz–3.2 GHz S-band. Using a scandium-doped aluminum nitride (Sc0.2Al0.8N) film, the filter is designed through a combined acoustic–electromagnetic simulation method, and the FBAR and filter are fabricated using an eight-step lithographic process. The measured FBAR presents an effective electromechanical coupling coefficient (keff2) value up to 13.3%, and the measured filter demonstrates a −3 dB bandwidth of 115 MHz (from 3.013 GHz to 3.128 GHz), a low insertion loss of −2.4 dB, and good out-of-band rejection of −30 dB. The measured 1 dB compression point of the fabricated filter is 30.5 dBm, and the first series resonator burns out first as the input power increases. This work paves the way for research on high-power RF filters in mobile communication.

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Section: Resultsmentioning

confidence: 99%

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Gao,

Zheng,

et al. 2024

Sensors

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“…Air damping is calculated using kokubun et al’s model [ 53 ], based on stake’s law to derive the air damping coefficient. Experimental data points carried out by Hartono in [ 54 ] show that the air damping coefficient is given by:

where

, and P are the variable beam width, variable beam sectional mass, temperature, Boltzmann’s constant, and atmospheric pressure in Pascals, respectively, at which the damping is evaluated. Aluminum nitride (piezoelectric material) is considered the sole contributor to material damping.…”

Section: Materials and Methodsmentioning

confidence: 99%

Gas Adsorption Response of Piezoelectrically Driven Microcantilever Beam Gas Sensors: Analytical, Numerical, and Experimental Characterizations

Nsubuga

Duggen

Marcondes³

et al. 2023

Sensors

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This work presents an approach for the estimation of the adsorbed mass of 1,5-diaminopentane (cadaverine) on a functionalized piezoelectrically driven microcantilever (PD-MC) sensor, using a polynomial developed from the characterization of the resonance frequency response to the known added mass. This work supplements the previous studies we carried out on the development of an electronic nose for the measurement of cadaverine in meat and fish, as a determinant of its freshness. An analytical transverse vibration analysis of a chosen microcantilever beam with given dimensions and desired resonance frequency (> 10 kHz) was conducted. Since the beam is considered stepped with both geometrical and material non-uniformity, a modal solution for stepped beams, extendable to clamped-free beams of any shape and structure, is derived and used for free and forced vibration analyses of the beam. The forced vibration analysis is then used for transformation to an equivalent electrical model, to address the fact that the microcantilever is both electronically actuated and read. An analytical resonance frequency response to the mass added is obtained by adding simulated masses to the free end of the beam. Experimental verification of the resonance frequency response is carried out, by applying known masses to the microcantilever while measuring the resonance frequency response using an impedance analyzer. The obtained response is then transformed into a resonance frequency to the added mass response polynomial using a polynomial fit. The resulting polynomial is then verified for performance using different masses of cantilever functionalization solution. The functionalized cantilever is then exposed to different concentrations of cadaverine while measuring the resonance frequency and mass of cadaverine adsorbed estimated using the previously obtained polynomial. The result is that there is the possibility of using this approach to estimate the mass of cadaverine gas adsorbed on a functionalized microcantilever, but the effectiveness of this approach is highly dependent on the known masses used for the development of the response polynomial model.

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A first-principles study of novel cubic AlN phases

Liu

Chen

et al. 2019

Journal of Physics and Chemistry of Solids

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Estimation of Material Damping Coefficients of AlN for Film Bulk Acoustic Wave Resonator

Cited by 3 publications

References 16 publications

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Gas Adsorption Response of Piezoelectrically Driven Microcantilever Beam Gas Sensors: Analytical, Numerical, and Experimental Characterizations

A first-principles study of novel cubic AlN phases

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