2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2016
DOI: 10.1109/asmc.2016.7491117
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Estimation of number of PGV for a 450mm fab: FA: Factory automation

Abstract: A mathematical method is proposed to estimate the minimum number of PGV (Person Guided Vehicle) for a 450mm wafer fab. As with the transition from 300mm to 450mm, the drive for 450mm wafers is primarily based on the economic benefits achieved by having a larger number of chip area on a substrate. This effort has begun at SUNY Polytechnic Institute Colleges of Nanoscale Science + Engineering, driven by the Global 450mm Consortium (G450C). The focus of G450C is to be a public-private partnership (CNSE, Intel, TS… Show more

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