Etch-a-Sketch Resonator

Abstract

Thispaper demonstrates AFM-based post-release piezoelectric domain engineering [1] on a Lithium Niobate (LN) MEMS resonator. We "Etch-A-Sketch" a poling pattern on the membrane resonator that redefines the electro-mechanical coupling of the mechanical vibration modes. This technique introduces a new resonance peak at 681 MHz to the original un-poled admittance spectrum of the resonator. In addition, this method only requires 80V (magnitude) to achieve domain inversion, which is over 100× lower than the poling voltage required for bulk LN. f y = 592 MHz f x = 681 MHz