Etching characteristics and plasma-induced damage of Ba0.65Sr0.35TiO3 thin films etched in CF4/Ar/O2 plasma

Quan, Zuci; Zhang, Baishun; Zhang, Tianjin; Guo, Tao; Pan, Ruikun; Jiang, Juan

doi:10.1016/j.mee.2006.12.007

Cited by 9 publications

(1 citation statement)

References 29 publications

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“…The etch rate is slower than that of Cl-based etch gas because the surface reaction product F-based compounds have a high melting point and boiling point (as is illustrated in Table 2). However, the etch rate could be tailored by controlling the addition of oxygen [35] . The etch rate may decrease by increasing F-based etch gas because it is easy to form fluorocarbon polymer film on the a-IGZO film with a large amount of F-based etch gas that stops further etching.…”

Section: F-based Etch Gasmentioning

confidence: 99%

Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films

Zheng¹,

Li²,

Wang³

et al. 2012

Plasma Sci. Technol.

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Amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistor (TFT) backplane technology is the best candidate for flat panel displays (FPDs). In this paper, a-IGZO TFT structures are described. The effects of etch parameters (rf power, dc-bias voltage and gas pressure) on the etch rate and etch profile are discussed. Three kinds of gas mixtures are compared in the dry etching process of a-IGZO thin films. Lastly, three problems are pointed out that need to be addressed in the dry etching process of a-IGZO TFTs.

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Section: F-based Etch Gasmentioning

confidence: 99%

Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films

Zheng¹,

Li²,

Wang³

et al. 2012

Plasma Sci. Technol.

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Robust Thin Films‐Based Triboelectric Nanogenerator Arrays for Harvesting Bidirectional Wind Energy

Quan

Han

Jiang

et al. 2015

Advanced Energy Materials

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157

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pyroelectric transportation, chemical, light, photonic systems, electromagnetic radiation, medical applications and so on, is a key question for the sustainable development of our society. [3][4][5][6][7][8][9][10][11][12][13][14][15] Technologies to harvest electrical energy from wind have extensive applications in self-powered systems of wireless electronics, mobile electronics, wearable electronics, civil engineering, and national security because wind energy is one of the cleanest, most abundant, sustainable, and cost-effi cient energies based on the threat of global warming and energy crisis. [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18] Some previous researches in nanogenerators were focused on piezoelectric materials, including ZnO, GaN, InN, MoS 2 , polyvinylidene fl uoride, lead zirconium titanate, BaTiO 3 , BiFeO 3 , NaNbO 3 , (1− x )Pb(Mg 1/3 Nb 2/3 )O 3x PbTiO 3 , 0.9525K 0.5 Na 0.5 NbO 3 -0.0475LiTaO 3 , and triangular-belt ZnSnO 3 , where a deformation of the piezoelectric material converted a small-scale mechanical energy into electricity. [18][19][20][21][22][23][24][25][26][27][28] Recently, triboelectric nanogenerators (TENGs) based on the coupling between triboelectrifi cation and electrostatic induction have been developed as a novel means of harvesting energy due to the unprecedented advantages of simple fabrication, light weight, excellent reliability, low cost, high power density, high energy conversion effi ciency, and abundant choices of materials since 2012. [13][14][15][16][17] In particular, wind-induced TENG with fl uttering membranes has been suggested as an alternative to overcome the drawbacks of wind-turbine-based wind energy generator including structural complexity, the large volume and weight, high cost of manufacturing and installation, low effi ciency and noise. [ 3 ] Bae et al. demonstrated that there had been considerable research on the basic dynamics of fl exible structures like fl ags, which could be bent, folded, twisted, or waved. [ 3,29 ] It was reported that the fl utter-driven TENG having small dimensions of 75 mm × 50 mm exhibited the electrical performances: an instantaneous output voltage of 200 V, a current of 60 µA with a frequency of 158 Hz, and an average power of about 0.86 mW at the airfl ow rate of 15 m s −1 . [ 3 ] Meng et al. reported that the airfl ow-driven TENG with the size of 90 mm × 50 mm × 15 mm consisted of an undulating polyimide (Kapton) fi lm and nineunit-segmented Al electrodes on the single substrate, revealing the maximum open-circuit voltage ( V OC ) of 30 V at 103 Hz without segmentation, a rectifi ed short-circuit current ( I SC ) of Wind-driven triboelectric nanogenerators (TENGs) play an important role in harvesting energy from ambient environments. Compared to single-side-fi xed triboelectric nanogenerator (STENG) arrays for harvesting single-pathway wind energy, double-side-fi xed triboelectric nanogenerator (DTENG) arrays are developed to harvest bidirectional wind energy. Electrical performances of the STENG and DTENG can ...

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