Ethanol and Acetone Gas Sensor Properties of Porous Silicon Based on Resistance Response

Moghimi, Emad; Azim Araghi, Mohammad Esmaeil

doi:10.1007/s12633-023-02607-z

Cited by 3 publications

(1 citation statement)

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“…The electrolyte concentration which is a basic factor in uniformity of porous Si samples was optimized. The prepared wafer was then applied in an experimental setup for sensor testing, which included a chamber with the porous Si sample, target vapor, connecting pipes with gas cut-off valves, a DC mini air pump, and a Fluke 289 multimeter for electrical data of sensor response which has been reported previously 34 . All estimations were done at room temperature.…”

Section: Methodsmentioning

confidence: 99%

Nanoscale morphology, optical dynamics and gas sensor of porous silicon

Ghaderi,

Sabbaghzadeh,

Dejam

et al. 2024

Sci Rep

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We investigated the multifaceted gas sensing properties of porous silicon thin films electrodeposited onto (100) oriented P-type silicon wafers substrates. Our investigation delves into morphological, optical properties, and sensing capabilities, aiming to optimize their use as efficient gas sensors. Morphological analysis revealed the development of unique surfaces with distinct characteristics compared to untreated sample, yielding substantially rougher yet flat surfaces, corroborated by Minkowski Functionals analysis. Fractal mathematics exploration emphasized that despite increased roughness, HF/ethanol-treated surfaces exhibit flatter attributes compared to untreated Si sample. Optical approaches established a correlation between increased porosity and elevated localized states and defects, influencing the Urbach energy value. This contributed to a reduction in steepness values, attributed to heightened dislocations and structural disturbances, while the transconductance parameter decreases. Simultaneously, porosity enhances the strength of electron‒phonon interaction. The porous silicon thin films were further tested as effective gas sensors for CO2 and O2 vapors at room temperature, displaying notable changes in electrical resistance with varying concentrations. These findings bring a comprehensive exploration of some important characteristics of porous silicon surfaces and established their potential for advanced industrial applications.

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Section: Methodsmentioning

confidence: 99%