Etude de la passivation de l'InP-n en plasmas RF et multipolaire d'oxygène

Belmahi, M.

doi:10.1051/rphysap:01989002403036900

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1999

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“…The anneal was performed after the deposition at the top of Au contact in order to improve the quality of the oxide and the interfacial layer. [17][18][19] MIS samples oxided by air are also used in this study. There are samples A and B ͑the oxide thickness is 35 Å for sample A and 45 Å for sample B͒.…”

Section: Methodsmentioning

confidence: 99%

Physical parameters of Au–n-InP structures

Touhami

Ravelet²

1999

Journal of Applied Physics

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Section: Methodsmentioning

confidence: 99%

Physical parameters of Au–n-InP structures

Touhami

Ravelet²

1999

Journal of Applied Physics

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Transport processes in Au/n-InP and Au/oxide/n-InP devices treated in oxygen multipolar plasma

Renard¹,

Ravelet²,

Simon³

et al. 1993

Materials Science and Engineering: B

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Effects of hydrogen on iron nitriding in a pulsed plasma

Bougdira¹,

Henrion²,

Fabry³

1991

J. Phys. D: Appl. Phys.

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A low frequency DC pulsed plasma used for iron nitriding is studied by means of an electrostatic probe and optical emission spectroscopy. The evolution of the electron density leads to the determination of the electron-ion recombination coefficient. The variations of this coefficient and the measurement of some emission lines of neutral iron and of excited states of neutral and ionic molecular nitrogen as a function of the percentage of H2 give additional insights into the role of hydrogen during the nitriding process. Thus the presence of vibrational states of nitrogen-N2(C3 Pi u, B3 Pi g, A3 Sigma u+), N2+(B2 Sigma u+)-late in the afterglow confirms their importance in such plasma assisted surface treatments.

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Etude de la passivation de l'InP-n en plasmas RF et multipolaire d'oxygène

Cited by 3 publications

References 4 publications

Physical parameters of Au–n-InP structures

Physical parameters of Au–n-InP structures

Transport processes in Au/n-InP and Au/oxide/n-InP devices treated in oxygen multipolar plasma

Effects of hydrogen on iron nitriding in a pulsed plasma

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