EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging

Abstract

For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-based EUV lasers to High Harmonic Generation. In this paper, we first describe the principle of a Hartmann sensor and give some key parameters to design a high-performance sensor. We also present different applications from metrology (for manual or automatic alignment of optics), to soft X-ray source optimization and X-ray imaging.

Special Issue “EUV and X-ray Wavefront Sensing”

“…The SI starts with an article [ 1 ] covering the general aspects of EUV and Hard X-ray Hartmann Wavefront Sensors, describing some specific applications. With more than 15 years of experience, the authors guide the readers in understanding the potentiality of the Hartmann technique and how its proper calibration and application can help in optimizing the performance of a beamline.…”

Адаптивная И Активная Рентгеновская Оптика

“…После восстановления карты градиента волнового фронта с использованием алгоритма реконструкции волнового фронта восстанавливается сам волновой фронт [105][106][107][108]. Главное преимущество метода в том, что в нем используется очень простая оптическая система, его главный недостаток -необходимость калибровки детектора [109,110].…”

Adaptive and active X-ray optics

“…After the recovery of the wavefront gradient map using the wavefront reconstruction algorithm, the wavefront itself is restored [105][106][107][108]. The main advantage of the method is that it uses a very simple optical system, its main drawback is the need to calibrate the detector [109,110]. The Shack−Hartmann method is a variation of the classical Hartman method with the difference that instead of a diaphragm mask, a microlens array is used to break the wavefront into multiple parts, each forming a separate focal spot [111] (Fig.…”