2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2019
DOI: 10.1109/asmc.2019.8791758
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Evaluating Automated Guided Vehicle System Characteristics in Semiconductor Fab Automated Material Handling Systems

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Cited by 5 publications
(2 citation statements)
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“…In [270], authors applied both static and dynamic methods involving discrete event simulation to determine the appropriate number of AGVs needed for transportation tasks in the photolithography section of a semiconductor manufacturing facility. For semiconductor manufacturing facilities, advantages and disadvantages of different layout topologies through which AGV can be deployed are discussed in [271]. Due to the special nature of semiconductor manufacturing facilities, different types of AGV topologies for integrating AGVs including: segregated, unified and supported topologies are discussed in [271].…”
Section: G Applications and Use Casesmentioning
confidence: 99%
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“…In [270], authors applied both static and dynamic methods involving discrete event simulation to determine the appropriate number of AGVs needed for transportation tasks in the photolithography section of a semiconductor manufacturing facility. For semiconductor manufacturing facilities, advantages and disadvantages of different layout topologies through which AGV can be deployed are discussed in [271]. Due to the special nature of semiconductor manufacturing facilities, different types of AGV topologies for integrating AGVs including: segregated, unified and supported topologies are discussed in [271].…”
Section: G Applications and Use Casesmentioning
confidence: 99%
“…For semiconductor manufacturing facilities, advantages and disadvantages of different layout topologies through which AGV can be deployed are discussed in [271]. Due to the special nature of semiconductor manufacturing facilities, different types of AGV topologies for integrating AGVs including: segregated, unified and supported topologies are discussed in [271]. In segregated topologies, the entire factory floor area is divided into zones, and workflow of each zone are serviced by one or more AGVs.…”
Section: G Applications and Use Casesmentioning
confidence: 99%