“…Using large area film preparation technology, thin film strain resistance is placed on metal elastic substrate, with high precision, good creep, and strong anti-interference ability, etc. (Agarwala et al, 2017;Kirthika et al, 2017;Qiao et al, 2018;Russell et al, 2022). Through the development of new material systems and new physical mechanisms, piezoelectric thin film sensors have made great progress in sensitivity, response range, response time, linearity, hysteresis, and stability, and have shifted from the development of a single sensor to the development and optimization of the system level.…”