2020
DOI: 10.21014/acta_imeko.v9i5.1007
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Evaluation and correction of systematic effects in a simultaneous 3-axis vibration calibration system

Abstract: This paper presents a calibration method, recently realized at INRIM, suitable for the calibration of 3-axis accelerometers in frequency domain. The procedure, allows to simultaneously evaluate the main and transverse sensitivities on three axes by means of a single-axis vibration excitation of inclined planes. Nevertheless, the excitation system is subjected to spurious motions mainly due to the vibrational modes of the inclined planes and to the horizontal motions of the shaker. In order to provide the prope… Show more

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Cited by 9 publications
(7 citation statements)
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“…Systematic effects are caused by spurious components acting on the perpendicular plane with respect to the reference vertical axis z', which are mainly due to the vibrational modes of the inclined aluminum plates and to small horizontal motions of the shaker. Such effects are quantified in terms of amplitude and phase, by means of laser-Doppler velocimetry (Polytec OFV 505), for each inclined plane and for all frequencies, as described in detail in [10,11].…”
Section: Calibration Setup and Proceduresmentioning
confidence: 99%
“…Systematic effects are caused by spurious components acting on the perpendicular plane with respect to the reference vertical axis z', which are mainly due to the vibrational modes of the inclined aluminum plates and to small horizontal motions of the shaker. Such effects are quantified in terms of amplitude and phase, by means of laser-Doppler velocimetry (Polytec OFV 505), for each inclined plane and for all frequencies, as described in detail in [10,11].…”
Section: Calibration Setup and Proceduresmentioning
confidence: 99%
“…As a first step, it is necessary to evaluate the linear response of the sensor compared with a reference standard acceleration. To determine the metrological sensitivity of the sensor with respect to linear acceleration, a calibration is carried out using a tilt plate as a support, as described in detail in previous works [ 52 , 53 ]. The calibration system and procedure, developed at INRiM, allow one to provide the sensor sensitivity according to ISO 16063-21 [ 54 ] and thus the traceability to SI.…”
Section: Methodsmentioning
confidence: 99%
“…The experimental set-up allows one to generate a projection of the vertical reference acceleration, a ref , along three axes simultaneously. The calibration method and the experimental set-up, shown in Figure 4 , are described in detail in [ 52 , 53 ].…”
Section: Methodsmentioning
confidence: 99%
“…In this application, a specific system suitable for the simultaneous amplitude calibration of multicomponent MEMS sensors was used. The calibration method and the experimental set-up, shown in Figure 10 , have been described in detail in [ 49 , 50 ].…”
Section: Methodsmentioning
confidence: 99%