Evaluation of a new correction procedure for quantitative electron probe microanalysis

Love, G.; Scott, V. D.

doi:10.1088/0022-3727/11/10/002

Cited by 102 publications

(31 citation statements)

References 12 publications

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“…The backscatter coefficients are given by the expression of Love and Scott 10 : In this derivation of an analytic expression for R, Monte Carlo simulations were extensively used to test specific sets of parameters (E 0 , E c ) for correspondence to the R-factors calculated by this and other analytic expressions.…”

Section: Introductionmentioning

confidence: 99%

Simulation of electron‐excited X‐ray spectra with NIST–NIH Desktop Spectrum Analyzer (DTSA)

Newbury

Myklebust

2005

Surface & Interface Analysis

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Desktop Spectrum Analyzer (DTSA) is a comprehensive software platform for the collection, simulation, processing, qualitative, and quantitative analysis of electron-excited X-ray spectra. Spectrum simulation is based upon solving the rigorous expression for inner shell ionization, integrated from the incident beam energy to the critical excitation energy, taking into account energy loss of the primary electrons and the loss of ionization power due to electron backscattering. The user can choose from a wide range of cross sections for K-, L-and M-shell ionization, as well as for the X-ray continuum. Both energy-dispersive and wavelength-dispersive spectrometers can be simulated. The simulated spectrum can be inspected at each stage of its generation, propagation through the specimen, propagation through the detector windows and structure, and after application of the detector-broadening function. The final spectrum is calculated on an absolute dose and spectrometer efficiency basis, permitting comparison to experimentally measured spectra. Correspondence for K-shell intensity within ±20% relative to experimental values can be achieved over a wide range of photon energy. Appropriate counting statistics can be applied to the simulated spectra, enabling the user to test the accuracy of peak fitting with multiple linear least squares or sequential simplex nonlinear procedures. Published in 2005 by John Wiley & Sons, Ltd.

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Section: Introductionmentioning

confidence: 99%

Simulation of electron‐excited X‐ray spectra with NIST–NIH Desktop Spectrum Analyzer (DTSA)

Newbury

Myklebust

2005

Surface & Interface Analysis

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“…The measurements were performed at 4, 6,8,10,12,15,20,25 and 30keV. In order to avoid excessive dead-time corrections for the metal lines (see Part I), the metals and carbon were measured separately.…”

Section: Methodsmentioning

confidence: 99%

Quantitative electron probe microanalysis of carbon in binary carbides. II—data reduction and comparison of programs

Bastin

Heijligers

1986

X-Ray Spectrometry

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The performances of four current matrix correction programs have been tested on a data file of measurements on 13 binary carbides between 4 and 30 kV. Both the metal lines as well as the carbon Kα line have been measured, which resulted in 145 k ratios for the metals (relative to elemental standards) and 117 integral k ratios for carbon Kα (relative to Fe3C). Evidence is presented that the existing sets of mass absorption coefficients for carbon Kα radiation are perhaps not fully consistent and a new set is therefore proposed, which is in better agreement with the experimental results. Finally, it is shown that the modified Gaussian ϕ(ρz) approach, when used in conjunction with the new set of mass absorption coefficients, leads to unexpectedly good results, with a relative root‐mean‐square value of 3.7%. This demonstrates that even for carbon very good accuracy can be obtained, provided that proper care is exercised in the measurements and the proper procedures are followed.

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“…Valery has also called several relevant references to my attention, in particular Ref. [7]. I would like especially to thank Valentin Ivanov for simulating the surface electric fields for the geometry of Fig.…”

Section: Acknowledgementsmentioning

confidence: 97%

A Theory for the RF Surface Field for Various Metals at the Destructive Breakdown Limit

Wilson¹

2006

AIP Conference Proceedings

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This is a slightly revised version of the paper that will be published in the AAC06 proceedings. A number of minor changes have been made in the interest of clarity. A significant revision, however, has been made in the treatment of backscattering of incident electrons from a metal surface. In the conference publication it was assumed that incident electrons were backscattered without energy loss. In this publication the energy spectrum of the backscattered electrons is taken into account. This revision does not significantly change the conclusions concerning the relative resistance of various metals to breakdown. Abstract. By destructive breakdown we mean a breakdown event that results in surface melting over a macroscopic area in a high E-field region of an accelerator structure. A plasma forms over the molten area, bombarding the surface with an intense ion current (~10 8 A/cm 2 ), equivalent to a pressure of about a thousand Atmospheres. This pressure in turn causes molten copper to migrate away from the iris tip, resulting in measurable changes in the iris shape. The breakdown process can be roughly divided into four stages: (1) the formation of "plasma spots" at field emission sites, each spot leaving a crater-like footprint; (2) crater clustering, and the formation of areas with hundreds of overlapping craters; (3) surface melting in the region of a crater cluster; (4) the process after surface melting that leads to destructive breakdown. The physics underlying each of these stages is developed, and a comparison is made between the theory and experimental evidence whenever possible. The key to preventing breakdown lies in stage (3). A single plasma spot emits a current of several amperes, a portion of which returns to impact the surrounding area with a power density on the order 10 7 Watt/cm 2 . This power density is not quite adequate to melt the surrounding surface on a time scale short compared to the rf pulse length. In a crater field, however, the impact areas from multiple plasma spots overlap to provide sufficient power density for surface melting over an area on the order of 0.1 mm 2 or more. The key to preventing breakdown is to choose an iris tip material that requires the highest power density (proportional to the square of the rf surface field) for surface melting, taking into account the penetration depth of the impacting electrons. The rf surface field required for surface melting (relative to copper) has been calculated for a large number elementary metals, plus stainless-steel and carbon.

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Evaluation of a new correction procedure for quantitative electron probe microanalysis

Cited by 102 publications

References 12 publications

Simulation of electron‐excited X‐ray spectra with NIST–NIH Desktop Spectrum Analyzer (DTSA)

Simulation of electron‐excited X‐ray spectra with NIST–NIH Desktop Spectrum Analyzer (DTSA)

Quantitative electron probe microanalysis of carbon in binary carbides. II—data reduction and comparison of programs

A Theory for the RF Surface Field for Various Metals at the Destructive Breakdown Limit

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