Evaluation of an orifice probe for plasma diagnostics

Prokopenko, S. M. L.; Laframboise, J. G.; Goodings, John M.

doi:10.1088/0022-3727/5/12/304

Cited by 28 publications

(9 citation statements)

References 15 publications

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“…In these techniques solution aerosols are injected directly into a variety of high-temperature atomization cells at atmospheric pressure for vaporization, atomization, and excitation. These flames and plasmas often provide significant populations of positive ions, which can be extracted through an appropriate sampling orifice into a vacuum system for mass analysis and detection (3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20). Ions derived from elemental constituents of injected solution aerosols should also be extractable by a similar approach.…”

mentioning

confidence: 99%

Inductively coupled argon plasma as an ion source for mass spectrometric determination of trace elements

Houk¹,

Fassel²,

Flesch³

et al. 1980

Anal. Chem.

717

264

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mentioning

confidence: 99%

Inductively coupled argon plasma as an ion source for mass spectrometric determination of trace elements

Houk¹,

Fassel²,

Flesch³

et al. 1980

Anal. Chem.

717

264

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“…The first grid is grounded together with the housing of the RFA to prevent field penetration from the collector back through the orifice [19,21,27]. The second grid is negatively biased with a potential of −20 V to repel electrons from the plasma in order to separate the electrons and ions and to return the secondary electrons back to the collector [19,27]. In this study, it is believed that the effect of secondary electrons is negligible due to low ion energy.…”

Section: Retarding Field Ion Energy Analysermentioning

confidence: 99%

Spatially resolved ion energy distribution measurements in a large-area planar microwave plasma

Guo¹,

Ohl²

1998

J. Phys. D: Appl. Phys.

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By employing a movable retarding field analyser, ion energy distribution (IED) functions have been measured in a large-area microwave plasma at pressure, ranging from 0.3 to 0.8 mbar which are typical for the use of this plasma source. It can be shown that the IED functions are fully developed with decreasing exponential shapes. For a given microwave power, the IED function extends towards higher energies with increasing pressure. The mean ion energy also increases with increasing pressure and decreases with increasing distance from the active plasma region. The relationships between microwave power and mean ion energy are complex, but it is clear that the influence of microwave power on the IED and mean ion energy decreases at lower pressures and larger distances from the active plasma region. The mean ion energy near the active plasma region decreases strongly with the distance from the centre of the microwave coupling window and this implicitly shows that the plasma possesses a strongly inhomogeneous internal field structure in this direction.

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“…Such an orifice, backed by a collector and grid system, has been used previously to obtain the electron number density ne, the electron temperature Te, the space potential V, and an estimate of the metastable number density nni from the total and separated current characteristics (Prokopenko et al 1972(Prokopenko et al 1974a.…”

Section: Introductionmentioning

confidence: 99%

Holomorphic Extension of Cr-Functions With Singularities on a Hypersurface

Kytmanov¹

1991

Math. USSR Izv.

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The ion number density ni is determined by the orifice probe using a method independent of the electrons. The quantities measured experimentally through the orifice are the number of ions per unit time (ion saturation current ii) divided by the volume flow rate v of neutral gas. In the molecular flow region where v is constant, ni is simply obtained from a measurement of ii. The method is reliable when the random velocity distributions of the ions and neutrals remain unchanged by the sampling process, and is insensitive to the velocity distribution of the electrons. This determination of ni is potentially adaptable to a wide pressure and density range. The method has been applied here to an RF plasma in argon with an input power of 25 W for pressures from 0.001-10 Torr and number densities from 10*-1011 cm-3. For pressures between 0.02 and 0.2 Torr, ni obtained in this way is in good agreement with ne obtained from the probe characteristics. This determination of ni is much simpler and inherently more accurate (e 15 %) than that for ne using the orifice probe-or Langmuir probes (> 20 %).

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Evaluation of an orifice probe for plasma diagnostics

Cited by 28 publications

References 15 publications

Inductively coupled argon plasma as an ion source for mass spectrometric determination of trace elements

Inductively coupled argon plasma as an ion source for mass spectrometric determination of trace elements

Spatially resolved ion energy distribution measurements in a large-area planar microwave plasma

Holomorphic Extension of Cr-Functions With Singularities on a Hypersurface

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