Evaluation of anisotropic structure in electrodeposited Ni film using micro-sized cantilever

Imamura, Hirohito; Nagoshi, Takashi; Yoshida, Atsuya; Chang, Tso-Fu Mark; Onaka, Susumu; Sone, Masato

doi:10.1016/j.mee.2012.07.118

Cited by 11 publications

(7 citation statements)

References 10 publications

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“…Various micro-mechanical testing methods have been reported by our group and other groups, which include bending tests 6,7) , compression tests 5,[8][9][10][11] and tensile tests [12][13][14][15] . Among them, micro-tensile tests are rarely reported due to the dif culties in fabrication of the specimens and the gripper.…”

Section: Introductionmentioning

confidence: 99%

Deformation Behavior of Pure Cu and Cu-Ni-Si Alloy Evaluated by Micro-Tensile Testing

et al. 2016

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Micro-tensile tests of pure copper and a precipitation strengthening-type Cu alloy, Cu-Ni-Si alloy, were performed using micro-sized tensile specimens with 10 × 10 µm 2 in cross-section and 40 µm in length and a micro-gripper, which were fabricated by a focused ion beam system. The obtained experimental results were compared with the results of Cu-Ni-Si alloy bulk sample. The micro-tensile tests of both pure Cu and Cu-Ni-Si alloy showed the typical serrations caused by moving of dislocations and a decrease of ow stress by the necking. In the CuNi-Si alloy, characteristic deformation of work-hardening was observed. Electron back scatter diffraction analysis showed a gradual change in crystal orientation at the necking area.

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Section: Introductionmentioning

confidence: 99%

Deformation Behavior of Pure Cu and Cu-Ni-Si Alloy Evaluated by Micro-Tensile Testing

et al. 2016

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“…In general, the orientation of metal lms is highly dependent on the electrolyte, so, it is considered to be due to the electrolyte. Imamura et al also reported that the direction of the columnar grains in electrodeposited Ni could affect the mechanical properties in micro bending tests 18) . It would be also interesting to evaluate the anisotropic structure of the electrodeposited Au by mechanical testing.…”

Section: Resultsmentioning

confidence: 99%

Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression

et al. 2016

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Micro-compression tests were conducted to evaluate micro-mechanical properties of electrodeposited gold. The gold lm was electrodeposited on a platinum substrate with a thickness of 40 μm. The gold lm was found to be composed of columnar textures along the lm growth direction. Two sizes (10 × 10 × 20 μm 3 and 20 × 20 × 40 μm 3 ) of micro-pillars with a square cross-section and the long-side parallel to the Pt/ Au interface were fabricated by focused ion beam. From the micro-compression tests, brittle fracture was observed. Both of the micro-pillars showed a high compressive strength of about 600 MPa, which are much higher than the strength of the bulk gold. Grain size of the gold lm was estimated to be 14.7 nm, which is believed to be the main factor giving the high compressive strength. The strength of the larger micro-pillar was slightly lower than that of the smaller micro-pillar. The results con rmed presence of the size effect in these specimens.

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“…Stress-strain curve in Figure 8 shows increase in compressive stress of the parallel pillar. However, in the cantilever bending test of same material indicate maximum stress of 2080 and 1582 MPa for the parallel and perpendicular cantilever with respect to the growth direction [38], i.e., the strength increased when the load direction vertical to the growth direction of the electrodeposited film which is the opposite result than the compression test. This is related to the stress gradient present in bending test where the stress maximizes at a fixed end and decreases along beam direction or neutralizes at the center of beam.…”

Section: Compression Test Of Electrodeposited Nickelmentioning

confidence: 85%

Evaluation Methods of Mechanical Properties of Micro-Sized Specimens

Nagoshi¹,

Chang²

2019

Novel Metal Electrodeposition and the Recent Application

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Micro-sized components have been widely used to microelectromechanical systems (MEMSs) and medical apparatus in recent years. Measurement methodologies of the mechanical property of small materials need to be improved for structural designing of these devices because of their component size reduced to micro-or nano-regime where sample size effects emerge. Mechanical properties and deformation behavior could be very different with their dimensions and geometries especially for small materials. Our experiments on the micro-specimen tested in different dimensions and loading directions are suitable for the evaluations of materials for MEMS components. In this chapter, recent studies on micro-testing of bending, compression, and tension with micro-sized samples will be presented including fabrication methods of non-tapered micro-sized specimens.

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Evaluation of anisotropic structure in electrodeposited Ni film using micro-sized cantilever

Cited by 11 publications

References 10 publications

Deformation Behavior of Pure Cu and Cu-Ni-Si Alloy Evaluated by Micro-Tensile Testing

Deformation Behavior of Pure Cu and Cu-Ni-Si Alloy Evaluated by Micro-Tensile Testing

Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression

Evaluation Methods of Mechanical Properties of Micro-Sized Specimens

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