Evaluation of Grain Shape of Metals Using SEM with Segmented BSE Detector

Abstract

Analysis of the particle size of metal specimens is important for quality control of metal alloys. In many cases, the EBSD method was used for grain size analysis. However, the EBSD method requires that the specimen be tilted at a signi cant angle. Therefore, we tried to observe the grain size using a new detector under non tilted sample conditions. The detector is a segmented backscattered electron detector that can detect differences in signal intensity due to the EBSD pattern of each segment. The detected signal intensities were compared to obtain the particle shape, and the particle size was measured using this data.