The Large Hadron Collider at CERN will undergo an upgrade in
order to increase its luminosity to
7.5 × 1034 cm-2s-1. The increased luminosity
during this High-Luminosity running phase, starting around 2029,
means a higher rate of proton-proton interactions, hence a larger
ionizing dose and particle fluence for the detectors. The current
tracking system of the CMS experiment will be fully replaced in
order to cope with the new operating conditions. Prototype planar
pixel sensors for the CMS Inner Tracker with square
50 μm × 50 μm and rectangular
100 μm × 25 μm pixels read out by the
RD53A chip were characterized in the lab and at the DESY-II testbeam
facility in order to identify designs that meet the requirements of
CMS during the High-Luminosity running phase. A spatial resolution
of approximately 3.4 μm (2 μm) is obtained using the
modules with 50 μm × 50 μm
(100 μm × 25 μm) pixels at the optimal
angle of incidence before irradiation. After irradiation to a 1 MeV
neutron equivalent fluence of
Φeq = 5.3 × 1015 cm-2, a resolution of
9.4 μm is achieved at a bias voltage of 800 V using a module
with 50 μm × 50 μm pixel size. All modules
retain a hit efficiency in excess of 99% after irradiation to
fluences up to 2.1 × 1016 cm-2. Further studies of
the electrical properties of the modules, especially crosstalk, are
also presented in this paper.