Surface oxidation of Fe-19Cr-17Ni, Fe-19Cr-18Ni-1Al and TiC-enriched Fe-19Cr-18Ni-1Al alloys was investigated by photoelectron spectroscopy (PES). The experiments were conducted at 323 K in pure O 2 (2.7 × 10 −6 mbar). Composition and morphology of the nanoscale surface oxides were determined quantitatively by inelastic electron background analysis. Moreover, use of synchrotron radiation facilities were necessary to obtain improved sensitivity for studying minor alloying elements such as Al and Si. The results indicate oxygen-induced segregation of Al, which significantly hinders the oxidation of the major alloying elements Fe and Cr. Ti remains in its inert carbide form. The relative concentration of Fe within the oxide layer was found to increase with the oxide-layer thickness, indicating greater mobility of Fe relative to other alloying elements.