2014
DOI: 10.1016/j.nds.2014.08.074
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Evaluation of Non-Rutherford Alpha Elastic Scattering Cross-sections for Silicon

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Cited by 9 publications
(4 citation statements)
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“…The selection of techniques was made regarding the complementarity of obtained information for the specific case of this study: the boron concentration was determined by Nuclear Reaction Analysis (NRA) using the 11 B(p,α 0 ) 8 Be nuclear reaction [15]; the oxygen content on the sample was determined by Elastic Backscattering Spectrometry (EBS); and Rutherford Backscattering Spectrometry (RBS) was used to provide additional information on the depth profile of elements. For the EBS modeling, the cross-section for the 16 O(p,p) 16 O elastic scattering provided by SigmaCalc was used [16]. The set of spectra was processed selfconsistently [17,18], which means that all spectra were fitted simultaneously by the minimization of a χ 2 function that takes into account all spectra.…”
Section: Boron Deposition and Ion Beam Analysismentioning
confidence: 99%
“…The selection of techniques was made regarding the complementarity of obtained information for the specific case of this study: the boron concentration was determined by Nuclear Reaction Analysis (NRA) using the 11 B(p,α 0 ) 8 Be nuclear reaction [15]; the oxygen content on the sample was determined by Elastic Backscattering Spectrometry (EBS); and Rutherford Backscattering Spectrometry (RBS) was used to provide additional information on the depth profile of elements. For the EBS modeling, the cross-section for the 16 O(p,p) 16 O elastic scattering provided by SigmaCalc was used [16]. The set of spectra was processed selfconsistently [17,18], which means that all spectra were fitted simultaneously by the minimization of a χ 2 function that takes into account all spectra.…”
Section: Boron Deposition and Ion Beam Analysismentioning
confidence: 99%
“…10 is widely agreed (see Bailey et al 126 ): such models have many parameters, as can be seen from the case of 28 Si(α,α) 28 Si reaction (involving the 32 S compound nucleus, see Table 2). 127 What is interesting is that constructing a detailed nuclear model sufficiently accurate for analytical purposes usually cannot be done from the existing, apparently comprehensive, compilations of nuclear data. In the 28 Si + α case initial data taken from the literature (regarded as authoritative: see Table 2) were significantly changed quantitativelyand even qualitatively in the assignment of quantum numbersin the effort to accurately fit the observed cross-section data.…”
Section: Evaluated Elastic Backscattering (Ebs) Cross-sectionsmentioning
confidence: 99%
“…Γ is the total resonance strength. NPA1990: Endt, Nuclear Physics A (1990); 131 NDS2011: Ouellet & Singh, Nuclear Data Sheets (2011)132 relies entirely on Källman, Zeitschrift für Physik A (1996);133 Surrey: Gurbich & Jeynes, Nuclear Data Sheets (2014)127 .…”
mentioning
confidence: 99%
“…Proton elastic backscattering spectrometry (EBS) is a powerful method which has been widely used for accurate analysis of materials, such as impurity distributions in thin layers, determination of stoichiometry and elemental areal density. Compared to alpha particle EBS, proton EBS offers useful excursions from the Rutherford cross section, such as enhancements and resonant structures, at lower beam energy than for alpha particle EBS, whilst allowing a similar analysis depth [1][2][3]. Non-Rutherford proton EBS may thus be used on accelerators with lower energies than those required for EBS with alpha particles.…”
Section: Introductionmentioning
confidence: 99%