2019
DOI: 10.1016/j.jmapro.2019.01.005
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Evaluation of scale effect of micro electrical discharge machining system

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Cited by 13 publications
(2 citation statements)
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“…The industrial sector, including chemical, aerospace, medical, microelectronics and automotive, has e become the main user of miniature finished products with high quality, high precision and high 3D accuracy [ 1 , 2 , 3 , 4 , 5 ]. While processes such as electro-discharge machining, laser micro manufacturing, lithography, and deep reactive ion etching can be used for micro components, these are not cost effective, and require highly skilled manpower and high operation time [ 6 , 7 , 8 , 9 , 10 ]. Micro milling is the most popular micro-machining process, as it is time and cost effective for the production of 3D miniature parts.…”
Section: Introductionmentioning
confidence: 99%
“…The industrial sector, including chemical, aerospace, medical, microelectronics and automotive, has e become the main user of miniature finished products with high quality, high precision and high 3D accuracy [ 1 , 2 , 3 , 4 , 5 ]. While processes such as electro-discharge machining, laser micro manufacturing, lithography, and deep reactive ion etching can be used for micro components, these are not cost effective, and require highly skilled manpower and high operation time [ 6 , 7 , 8 , 9 , 10 ]. Micro milling is the most popular micro-machining process, as it is time and cost effective for the production of 3D miniature parts.…”
Section: Introductionmentioning
confidence: 99%
“…Miniaturised components can be manufactured by (i) electro-discharge machining [7][8][9][10], (ii) laser micromanufacturing [11][12][13], (iii) lithography, electroplating and moulding (LIGA) [14,15], (iv) deep reactive ion etching [16,17], (v) deep UV lithography [18,19] or (vi) mechanical micromachining [20][21][22][23][24] technologies. Excellently precise geometrical features and small tolerances can be achieved by these micromachining technologies; however, their operation time and cost are often extremely high.…”
Section: Introductionmentioning
confidence: 99%