2011
DOI: 10.1116/1.3521507
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Evaluation of the electrical and physical properties of thin calcium titanate high-k insulators for capacitor applications

Abstract: Articles you may be interested inReduction of leakage currents with nanocrystals embedded in an amorphous matrix in metal-insulator-metal capacitor stacks Appl. Phys. Lett. 99, 222905 (2011); 10.1063/1.3664395 Temperature dependence of TaAlO x metal-insulator-metal capacitors J. Vac. Sci. Technol. B 29, 01AC06 (2011); 10.1116/1.3535558 Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO 3 -based metalinsulator-metal capacitors grown by atomic layer deposition J. Vac. S… Show more

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Cited by 13 publications
(12 citation statements)
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“…This is slightly below the temperature of approximately 650°C for which full crystallization of the whole layer on top of a Si substrate was achieved in previous investigations. 27 The deposition rate of CaTiO 3 was approximately 0.17 nm/min.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…This is slightly below the temperature of approximately 650°C for which full crystallization of the whole layer on top of a Si substrate was achieved in previous investigations. 27 The deposition rate of CaTiO 3 was approximately 0.17 nm/min.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…The PL contour maps in the photon energy domain for nanocrystalline CaTiO 3 We decided to analyze the PL contour map of emission from nanocrystalline CaTiO 3 at 77 K when plotted in the photon energy domain, Figure 6. In Figure 6, the set of progressive emission contours starting from the point with coordinates (E exc = 2.50 eV and E emiss = 2.50 eV), which is directed at the 45 degrees angle is due to the Raleigh (excitation) lines, and this set of contours is labeled "Raleigh".…”
Section: Cryo-synchronous Pl Spectroscopymentioning
confidence: 99%
“…On the other hand, the PL excitation spectrum is obtained by changing the λ exc , while the PL emission is monitored at a desired constant λ emiss . The major drawback of "conventional" PL spectroscopy is very broad, 3 strongly overlapping spectral bands which are difficult to resolve into contributions from the individual electronic states.…”
Section: Introductionmentioning
confidence: 99%
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“…These titanates have recently attracted attention because some titanates are used as semi-conductive, ferroelectric and photorefractive materials. Dielectrics based on calcium titanate are widely used in different fields of electronics applications [5][6][7]. For its high relative permittivity and low dielectric losses CaTiO 3 is recommended as a prospective ceramic material for high frequency electronics applications.…”
Section: Introductionmentioning
confidence: 99%