Evaluation of the instrument for three‐dimensional atom probe (3DAP)

Kaneko, Tetsuya; Ito, Seiya; Yamashita, C.; Mayama, Norihito; Iwata, Tatsuya; Nojima, Masashi; Taniguchi, Masateru; Owari, Masanori

doi:10.1002/sia.2962

Cited by 7 publications

(7 citation statements)

References 9 publications

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“…The position data are also used to calculate accurate flight time to obtain the mass spectrum because the flight distance depends on the detected position. [6] The laser system is a high-power ultra-fast fiber laser (Fianium). It is constituted by a Yb-doped fiber laser.…”

Section: Dap Systemmentioning

confidence: 99%

Development of preset‐type sample stage in three‐dimensional atom probe

Ito

Kaneko

Yamashita

et al. 2008

Surface & Interface Analysis

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Three-dimensional atom probe (3DAP) equipped with a newly designed preset-type sample stage has been developed. This new type of sample stage can reduce the costs of constructing a 3DAP instrument, and this instrument consists of quite simple components because the complicated mechanism to make any desired adjustment is no longer required to be done in a vacuum. These advantages are expected to lead to the wider distribution of 3DAP.In addition, a wider range of applications is also expected in our equipment because the atoms can be field-evaporated by means of either high-voltage pulses or femto-second laser pulses. In this article, the performance of the pulse voltage mode and pulse laser mode are described and illustrated through the investigation of metals.

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Section: Dap Systemmentioning

confidence: 99%

Development of preset‐type sample stage in three‐dimensional atom probe

Ito

Kaneko

Yamashita

et al. 2008

Surface & Interface Analysis

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“…The TOF of ions can be calculated from the difference between the signals from the photodiode and the PSD. Details of the system have been given in our previous papers [5,6].…”

Section: A Instrumentationmentioning

confidence: 99%

“…We have developed a wide-angle laser-assisted 3DAP [5,6] with a MCP (120 mm diameter) set up at a distance of * Corresponding author: mayama@iis.u-tokyo.ac.jp 110 mm in front of the tip. The wide-angle (0.75 sr) atom probe is equipped with a femtosecond (180 fs) laser and a high-resolution (25 ps) time-to-digital converter (TDC) system, so that the mass resolution is dependent on the flight path difference of detected ions.…”

Section: Introductionmentioning

confidence: 99%

Improvement of Mass Resolution in Wide-Angle Laser-Assisted Atom Probe by Flight Path Compensation

Mayama

Kajiwara

Mikami

et al. 2009

e-J. Surf. Sci. Nanotechnol.

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A wide-angle laser-assisted three-dimensional atom probe (3DAP) was developed, with a wide angle (0.75 sr) and short flight distance (110 mm) adopted to enlarge the analysis area of the tip. However, the short flight distance of ions resulted in the degradation of mass resolution. Therefore, flight path compensation was examined to improve the mass resolution in the 3DAP with a flight distance of 110 mm. With geometric compensation based on a simple concentric sphere model, the detected ions could be identified. By the compensation of the flight path for a small inclination on the microchannel plate (MCP) in the direction normal to the tip axis, the isotopes of detected ions were identified and high mass resolution was attained for a very short flight distance.

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“…Ion flight time signals were taken as output from the MCP, and the position of ion was calculated from signals provided by the delay line outputs. In the instrument, a preset-type sample stage with a local microelectrode was adopted [7,8]. The ultra high vacuum in the main chamber was in the order of 10 −8 Pa.…”

Section: A Instrumentationmentioning

confidence: 99%

Dependence of Field Evaporation Voltage on Polarization Angle of Femtosecond Laser in 3D Atom Probe

Mayama

Mikami

Ito

et al. 2009

e-J. Surf. Sci. Nanotechnol.

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Recently, laser pulses on a three-dimensional atom probe have been used to induce field evaporation. The advantages of laser-pulse atom probes are application to higher resistivity materials such as semiconductors and high mass resolution. Early studies of laser-pulse atom probes were performed with laser pulses of nanosecond duration. All evidence from these early studies and most recent studies using sub-picosecond laser pulses have indicated that the field evaporation of atoms by laser pulses occurred by a thermal pulsing mechanism. On the other hand, some recent experiments with sub-picosecond laser pulses have resulted in the proposal of athermal mechanisms (e.g., optical rectification) of field evaporation. Thus, the mechanism of field evaporation at the apex of a needle specimen by sub-picosecond laser pulses has not yet been established. We report the dependence of field evaporation voltage on the polarization angle of femtosecond laser pulses for metal specimens.

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Evaluation of the instrument for three‐dimensional atom probe (3DAP)

Cited by 7 publications

References 9 publications

Development of preset‐type sample stage in three‐dimensional atom probe

Development of preset‐type sample stage in three‐dimensional atom probe

Improvement of Mass Resolution in Wide-Angle Laser-Assisted Atom Probe by Flight Path Compensation

Dependence of Field Evaporation Voltage on Polarization Angle of Femtosecond Laser in 3D Atom Probe

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