“…Besides, nanowear mechanisms met in various microsystems are generally closer to the polishing process in terms of wear rate [9] than the classical mechanisms of abrasion [10], adhesion [7] or ploughing [4,11,12]. This peculiar wear process mainly results from the combination of a low contact pressure and a closed multi-asperity tribocontact that acts as a triboreactor at the micro/nanoscale [13][14][15][16][17], where thermal effects [18], chemical and physico-chemical interactions [19,1,20,21,7], environment's influence [14,[22][23][24]15,19,25], and tribolayer are likely to control the tribological behavior, as a selforganization process [26,27,15,16,18,17].…”