Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications

Cheng, Hongsheng; Shao, Gang; Ebadi, Siamak; Ren, Xinhua; Harris, Kyle; Liu, Jian; Xu, Chengying; An, Linan; Gong, Xun

doi:10.1016/j.sna.2014.09.010

Cited by 56 publications

(46 citation statements)

References 27 publications

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“…Electric properties of polymer-derived ceramics (PDCs) have been extensively studied over the last decades due to their potential applications for high-temperature sensors, microelectromechanical systems and energy storage. [1][2][3][4] PDCs exhibited an excellent high-temperature semiconducting behavior up to 1300°C [5][6][7] and ultrahigh piezoresistivity with gauge factors about 1000-4000. [8][9][10] These outstanding properties are attributed to the unique microstructure of PDCs, composing of SiCN amorphous matrix and self-assembled carbon cluster nanodomain (so called free carbon).…”

Section: Introductionmentioning

confidence: 99%

Enhanced electric conductivity of polymer‐derived SiCN ceramics by microwave post‐treatment

Shao

et al. 2016

J Am Ceram Soc

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The effect of microwave treatment on the electric conductivity and structure of a polymer‐derived SiCN ceramic is studied. It is found that the conductivity of the microwave‐treated sample is about 40 times higher than that of the conventional heat‐treated one at the same temperature and dwell time conventionally. The X‐ray diffraction patterns show that both samples are amorphous without obvious crystallization. Raman analysis reveals that the microwave‐treated sample exhibited a narrower full width at half maximum and upper‐shift of G peak. X‐ray photoelectron spectroscopy spectra show that there is a significant sp3‐to‐sp2 transition of free carbon in the microwave‐treated sample. These results suggest that the microwave‐treatment can induce a distinct structure evolution of the free carbon, which contributes to the remarkable enhancement of the conductivity of the sample.

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Section: Introductionmentioning

confidence: 99%

Enhanced electric conductivity of polymer‐derived SiCN ceramics by microwave post‐treatment

Shao

et al. 2016

J Am Ceram Soc

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“…Based on Su's study, the S 11 is an input reflection parameter (ie, the input return loss), and the resonant frequency ( f r ) of the resonator is expressed as 22

f_{r} = \frac{1}{2 π \sqrt{L (c_{p} + c_{r})}},

c_{p} = \frac{ε_{0} π b^{2}}{4 H},

where c p represents the parallel‐plate capacitance between the vertical parallel plates, c r represents the remaining fringing capacitance, L denotes the equivalent inductance, ε 0 denotes the relative permittivity of vacuum (8.854 × 10 −12 F /m), and H denotes the distance between the sensor cap (ie, the ceramic film with platinum coating) and the metal base. Figure 13B shows the simulation results of the change in f r with a variation in H , and the detailed simulation process can be obtained in Cheng's study 23 . Because H = 0.2 mm‐ D , the variation in H is equal to the negative variation in D (ie, Δ H = −Δ D ).…”

Section: Resultsmentioning

confidence: 99%

“…Figure 13B shows the simulation results of the change in f r with a variation in H, and the detailed simulation process can be obtained in Cheng's study. 23 Because H = 0.2 mm-D, the variation in H is equal to the negative variation in D (ie, ΔH = −ΔD). Hence, the change in f r with a variation in D can be obtain in Figure 13C.…”

Section: Resultsmentioning

confidence: 99%

Fabrication of high‐fracture‐strength and gas‐tightness PDC films via PIP process for pressure sensor application

Liu

Zhang

et al. 2020

J Am Ceram Soc

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High‐fracture‐strength and high‐gas‐tightness thin‐film gas‐pressure sensors were fabricated using a silicon oxycarbonitride polymer‐derived‐ceramic (SiCNO‐PDC) material via a multiple polymer‐infiltration‐pyrolysis (PIP) process. To obtain dense SiCNO ceramic films, two types of liquid polyvinylsilazane (PVSZ) precursors were chosen; a high‐ceramic‐yield precursor with high viscosity (PVSZ‐1) was designed to construct the skeleton of ceramic film, whereas a relatively high‐ceramic‐yield precursor with low viscosity (PVSZ‐2) was designed to infiltrate in ceramic defects. The results confirmed that the PVSZ‐2 can effectively fill both intergranular and intragranular defects of ceramic films pyrolyzed by the PVSZ‐1, and produce the sponge‐like structures with nanosized pores. Although the density of the ceramic films only increased by 2.2%‐5.2% after PIP process, the gas tightness was fundamentally improved, and all ceramic films after PIP process could keep gas‐tight condition without loss of pressure after 72 hours. Similarly, the fracture strengths of the ceramic films after PIP cycles have also been improved, and the value could reach 108 MPa after only three PIP cycles. In addition, because a linear relationship among the load, resonant frequency, and deflection was detected in our ceramic films, the wireless passive gas‐pressure sensors with high‐sensitivity and high‐temperature resistance have been fabricated. It strongly indicates that the ceramic films obtained by our PIP process have real potential to be used as thin‐film gas‐pressure sensing elements in high‐temperature and high‐pressure fields.

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“…Literature reports many developments performed on passive pressure sensors with different technologies and devices, such as, e.g., microwave circuits [6] [7], microwave cavity resonators [8], evanescent mode resonator [9], slot antenna integrated resonator [10], capacitive sensors [11], or dielectric resonators [12]. Table I reports some of their characteristics in terms of pressure measurement range, operating frequency fres, full-scale frequency range, and the measurement sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Passive and chipless packaged transducer for wireless pressure measurement

Philippe

Paolis

Arenas-Buendia

et al. 2018

Sensors and Actuators A: Physical

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A new microwave fully passive, chipless and packaged sensor for wireless pressure monitoring in harsh environments (such as, extreme temperature, radioactive and/or toxic environments) is proposed in this paper. The sensor consists of a planar microstrip resonator, which is electromagnetically coupled with a high resistivity and thin silicon membrane. Prototypes have been designed and fabricated using a photoresist intermediate layer for the silicon membrane bonding. The electromagnetic simulation of the system is also performed in order to predict the transducer performances. Measurement results using the packaged sensor are provided to experimentally validate the simulation results and the manufacturing process.

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Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications

Cited by 56 publications

References 27 publications

Enhanced electric conductivity of polymer‐derived SiCN ceramics by microwave post‐treatment

Enhanced electric conductivity of polymer‐derived SiCN ceramics by microwave post‐treatment

Fabrication of high‐fracture‐strength and gas‐tightness PDC films via PIP process for pressure sensor application

Passive and chipless packaged transducer for wireless pressure measurement

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