Silicon has long been known to be an unintentional impurity often present in GaP; however, the concentration of the Si and its effects have not been known. It has been observed that the net donor concentration in undoped LPE layers fluctuates from ,~1 X 10i6 cm-3 < Nd --Na ~ 2-4 • 10 i7 cm-S for different growth runs-when growth is in ,--1 atm of H2. This background Nd --Na is attributed to unintentionally present Si donors. The Si concentrations in these as well as S-and Zn-doped layers as determined by ion microanalyzer measurements range from ,--6 • 10 i6 cm -3 ~< XSsi ~< 2 • 10 is cm -a with the typical value being ,~5~ • 10 i7 cm -3. In the undoped layers XSsi often exceeds Nd --Na. The variations in both background Nd --Na and XSsi are attributed to variations in the oxygen level of the gas ambient which is inversely related to the XSsi. An important reaction resulting in Si contamination is H2 reduction of the quartz used in the construction of the LPE growth system. With a growth sequence designed to grow both a Zn-and oxygendoped p-layer onto an unctoped n-layer in the same growth run, SiO2 precipitates have been observed in the p-layer near the p-n junction. The identification of these precipitates as SiO2 is further proof of the high levels of Si contamination that can occur during LPE growth. Minority carrier lifetimes for Si-doped LPE layers with Nd --Na > 5 • 1017 cm -3 are considerably longer than have been obtained by doping with S or Te. The increased lifetime is attributed to either a reaction involving Si which results in the reduction in the concentration of an important nonradiative center or the fact that the usual dopants S and Te themselves are involved in a nonradiative center.For several years it has been known that Si is often found as an unintentional impurity in GaP (1); however, thi.s Si contamination has received little attention, especially in the LPE layers used in LED's. In this paper we review both previous work and present additional data which together provide a better understanding of Si contamination resulting from LPE growth.Early work by Trumbore et aI. (2) studied Si incorporation into intentionally Si-doped samples. One observation was that emission spectroscopic measurements always yielded a higher value for the Si concentration than did a spectrophotometric (a chemical separation followed by a spectroscopic measurement) determination. They felt that the spectrophotometric analysis was more accurate and so weighed those data points more heavily in their analysis. However, the same data were later reinterpreted (3) by suggesting that the spectr0photometric method yields the isolated Si (or Si-Si pairs) in solid solution while the emission spectroscopic (as well as electron microprobe) method yields the total Si content including Si in the form of some second phase (e.g., SiO2) or complex which is insoluble in the reagents used to dissolve the GaP for the spectrophotometric analysis. Thus, there is early evidence that the incorporation of Si into GaP may be complicated in...