Understanding the ordering transition from A1 to L10 structure in FePt thin films is of great significance for developing L10-FePt films as ultrahigh density magnetic recording media. Here, the L10-ordering transition of FePt films has been investigated based on activation volume measurements. A large activation volume ΔV∗=10–11 Å3=(0.75–0.8) Ω, where Ω is average atomic volume of FePt, is determined for atomic diffusions in the L10-ordering transition, indicating a thermal-vacancy-assisted phase transition. This transition is suggested to be predominantly dependent on the diffusion of Fe atoms. These findings have direct implications for yielding L10-FePt films at low temperatures and optimizing their microstructures.