2012
DOI: 10.1063/1.4711046
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Evolution of electrical performance of ZnO-based thin-film transistors by low temperature annealing

Abstract: The effects of post-annealing on performance of ZnO-based thin-film transistors (TFTs) fabricated at room temperature were investigated. It was observed that high-temperature annealing resulted in a large decrease in resistivity of the ZnO channel layer and caused a large off-state current for ZnO TFTs, while low-temperature annealing had little effect on the off-state current. The evolution of electrical performance of ZnO TFTs annealed at a lower temperature showed that the threshold voltage decreased greatl… Show more

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Cited by 12 publications
(2 citation statements)
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“…An enhancement in the electrical conductivity, i.e., a reduction in the resistivity, of the 7% and 9% In-doped ZnO semiconductors is the most likely explanation for these higher off-state currents. Note that a back-channel current conduction between source and drain electrodes in bottom-gate/top-contact structured TFTs, which is not controlled by V G , will dominate the off-state current when the resistivity of the channel layer is too low [ 32 , 33 ]. Previous studies have reported that the ideal resistivity of ZnO films for application in TFTs is about 10 5 –10 6 Ωcm [ 34 , 35 ].…”
Section: Resultsmentioning
confidence: 99%
“…An enhancement in the electrical conductivity, i.e., a reduction in the resistivity, of the 7% and 9% In-doped ZnO semiconductors is the most likely explanation for these higher off-state currents. Note that a back-channel current conduction between source and drain electrodes in bottom-gate/top-contact structured TFTs, which is not controlled by V G , will dominate the off-state current when the resistivity of the channel layer is too low [ 32 , 33 ]. Previous studies have reported that the ideal resistivity of ZnO films for application in TFTs is about 10 5 –10 6 Ωcm [ 34 , 35 ].…”
Section: Resultsmentioning
confidence: 99%
“…Zinc oxide (ZnO) is a promising n-type semiconductor material that is used in a wide range of applications, such as gas detection [1,2,3,4], dye-sensitized solar cells [5,6,7], antibacterial surface coatings [8], light-emitting diodes (LEDs) [9,10], nanopower generators [11], ultraviolet (UV) detection [12,13,14,15], and photocatalytic applications [16,17,18]. ZnO nanostructures have a direct wide band gap (3.37 eV) [19], chemical stability [20], optical [21], piezoelectric [22,23,24], and electrical [25] properties. Additionally, ZnO possesses piezoelectric properties and self-carrier generation when tensile strain force is applied or substrates are bent [26].…”
Section: Introductionmentioning
confidence: 99%