Evolution of electron temperature in inductively coupled plasma

Lee, Hyo-Chang; Seo, Byonghoon; Kwon, Deuk Chul; Kim, J. H.; Seong, Dong-Ook; Oh, Sea Cheon; Chung, Chin-Wook; You, Kwang Ho; Shin, ChaeHo

doi:10.1063/1.4971980

Cited by 32 publications

(16 citation statements)

References 50 publications

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“…Langmuir probes) with relevant theoretical models are available at low pressure. As considerable plasma parameters have been experimentally obtained via such simple diagnostics, they have allowed for further insights into plasma physics, including electron kinetics [27][28][29] and electron heating mechanisms [30,31].…”

Section: Introductionmentioning

confidence: 99%

Electron characterization in weakly ionized collisional plasmas: from principles to techniques

Park

Choe

Moon

et al. 2018

Advances in Physics: X

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Weakly ionized plasmas at or near 1 atm pressure, or atmospheric-pressure plasmas, have received increasing attention due to their scientific significance and potential for use in a variety of applications, particularly for medicine, agriculture, and food. However, there is a large imbalance between scientific research on plasma physics and applications, which is partly due to the considerable differences in the characteristics of these plasmas compared with those of low-pressure plasmas. This discrepancy is particularly related to the difficulty in performing plasma diagnostics for highly collisional plasmas. Information on electrons (such as the electron density and temperature) is essential since electrons play a dominant role in the generation of active species related to the physical and chemical processes inside the plasma. So far, limited diagnostics have been available for electrons such as Thomson scattering and optical emission diagnostics based on equilibrium models. Here, we review the available diagnostic methods along with their merits and limitations for characterizing electrons in weakly ionized collisional plasmas. Particular attention is paid to continuum radiation-based spectroscopy, which facilitates multidimensional imaging of electron density and temperature. The future impact of these plasmas on relevant fields (i.e. laboratory and industrial plasmas and their applications) is also addressed.

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Section: Introductionmentioning

confidence: 99%

Electron characterization in weakly ionized collisional plasmas: from principles to techniques

Park

Choe

Moon

et al. 2018

Advances in Physics: X

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“…The (positive and negative) ions in this drift field are generally considered to be at rest (being non-responsive to the RF electric field alternating at, e.g., 13.56 MHz, due to their heavy masses), while the mobile electrons can instantaneously follow the rapidly alternating electric field and, thus, be accelerated to high energies and cause ionization/excitation. Consequently, in previous studies of such plasmas most of the attention has been paid to the investigation of the electron dynamics [41][42][43][44][45]. The visual appearance of such discharges typically shows a homogeneous bright zone in the central bulk region surrounded by two dark sheath regions adjacent to the electrodes.…”

Section: Introductionmentioning

confidence: 99%

Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency

Liu

Korolov

Schüngel

et al. 2017

Plasma Sources Sci. Technol.

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Self-organized striated structures of the plasma emission have recently been observed in capacitive radiofrequency CF 4 plasmas by Phase Resolved Optical Emission Spectroscopy (PROES) and their formation was analyzed and understood by Particle in Cell / Monte Carlo Collision (PIC/MCC) simulations [Y.-X.Liu, et al. Phys. Rev. Lett. 116, 255002 (2016)]. The striations were found to result from the periodic generation of double layers due to the modulation of the densities of positive and negative ions responding to the externally applied RF potential. In this work, an in-depth analysis of the formation of striations is given, as well as the effect of the driving frequency on the plasma parameters, such as the spatially modulated charged species densities, the electric field, and the electron power absorption is studied by PROES measurements, PIC/MCC simulations, and an ion-ion plasma model. The measured spatiotemporal electronic excitation patterns at different driving frequencies show a high degree of consistency with the simulation results. The striation gap (i.e., the distance between two ion density maxima) is found to be inversely proportional to the driving frequency. In the presence of striations the minimum (CF 3 + , F − ) ion densities in the bulk region exhibit an approximately quadratic increase with the driving frequency. For these densities, the eigenfrequency of the ion-ion plasma is near the driving frequency, indicating that a resonance occurs between the positive and negative ions and the oscillating electric field inside the plasma bulk. The maximum ion densities in the plasma bulk are found not to exhibit a simple dependence on the driving frequency, since these ion densities are abnormally enhanced within a certain frequency range due to the ions being focused into the "striations" by the spatially modulated electric field inside the bulk region.2 / 31 Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency 2 / 31 deposition (PECVD) -often performed at relatively high pressures, low driving frequencies, and in electronegative gasessince the striations can drastically affect various process relevant plasma parameters, e.g., the flux-energy distribution functions of different charged species.One of the most well-known scenarios is the self-organized striated structure occurring in the positive column region of dc glow discharges, wherein ion-acoustic or ionization waves are generally considered to be responsible for their appearance [1,[11][12][13]. Over the past few years, several types of striated structures have been observed in different versions of atmospheric pressure plasma jets (APPJ). Depending on the discharge conditions, the plasma streamer ejected from the nozzle was found in [14,15] to be stratified into stationary bright and dark slender regions between the nozzle and the target plate. Very recently, a stratified filament occurring in the discharge tube of a RF argon APPJ was observed in num...

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“…This is, perhaps, due to the enhancement in the plasma density, i.e., the temperature of electrons or ions. 23 El-Hossary et al 24 studied the impact of plasma power on ZnO thin-film deposition. They observed that an increasing RF plasma power resulted in higher plasma species energy, owing to the increase of the substrate temperature.…”

Section: Resultsmentioning

confidence: 99%

“…It can be stated that on increasing the RF plasma power, the temperature also increases inside the reactor. This is, perhaps, due to the enhancement in the plasma density, i.e., the temperature of electrons or ions . El-Hossary et al studied the impact of plasma power on ZnO thin-film deposition.…”

Section: Resultsmentioning

confidence: 99%

Impact of Radio Frequency Plasma Power on the Structure, Crystallinity, Dislocation Density, and the Energy Band Gap of ZnO Nanostructure

et al. 2021

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The aim of this study is to investigate the effect of radio frequency (RF) plasma power on the morphology, crystal structure, elemental chemical composition, and optical properties of ZnO nanostructure using a direct current magnetron sputtering technique. This study emphasized that the growth rate and surface morphology of the polycrystalline ZnO were enhanced as the radio frequency (RF) plasma power increased. This can be observed by fixing other parameters such as the growth time, substrate temperature, and chamber partial pressure. The RF plasma power alteration from 150 to 300 W can produce uniform nanograin, spheroid, and nanorods. Additionally, the RF plasma power alteration leads to the alteration in the ZnO nanorod diameter from 14 to 202 nm. It was observed that the XRD intensities are increased at higher plasma powers. This, perhaps, can be inferred from the transformation of the granular microcrystals to the needlelike or platelike large crystals, as already examined using SEM images. This also has an impact on the average crystalline size, which increased from 10 to 40 nm on increasing the RF plasma power. Moreover, the increase of the RF plasma power has an obvious impact upon the optical band-gap energy, which was accordingly decreased from 3.26 to 3.22 eV. Finally, the absorption band edge was shifted to a lower-energy region due to the quantum size effect at the nanorange.

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Evolution of electron temperature in inductively coupled plasma

Cited by 32 publications

References 50 publications

Electron characterization in weakly ionized collisional plasmas: from principles to techniques

Electron characterization in weakly ionized collisional plasmas: from principles to techniques

Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency

Impact of Radio Frequency Plasma Power on the Structure, Crystallinity, Dislocation Density, and the Energy Band Gap of ZnO Nanostructure

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