1992
DOI: 10.1016/0304-3991(92)90174-i
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Evolution of microstructure and magnetic properties in magnetron-sputtered CoCr thin films

Abstract: The microstructure and magnetic-structure development in magnetron-sputtered Co-22at%Cr thin films deposited on amorphous substrates has been examined systematically and in detail. It has been found that the initial deposit is amorphous up to a thickness of ~ 5 nm. By 10 nm thickness, a polycrystalline highly hcp c-axis textured (out of the film plane) microstructure is observed. At 50 nm thickness, a distinct columnar morphology has developed. A distinct subgrain structure was also observed in the thinner fil… Show more

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Cited by 7 publications
(4 citation statements)
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“…It has already been verified by our initial transmission electron microscopy observation, which will be published elsewhere. For the as-prepared thin films, it was generally accepted that the c axis of the hcp Corich component is aligned in the film plane randomly [13]. Therefore, the isotropic in-plane hysteresis loops in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…It has already been verified by our initial transmission electron microscopy observation, which will be published elsewhere. For the as-prepared thin films, it was generally accepted that the c axis of the hcp Corich component is aligned in the film plane randomly [13]. Therefore, the isotropic in-plane hysteresis loops in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…1͒, the CoCr layer consists of Co-rich and Cr-rich phases and the former grains are separated by the latter ones. For small CoCr layer thickness, the c axis of the hcp Co-rich component is distributed in the film plane randomly, 16 which results in isotropic in-plane hysteresis loops in Fig. 3.…”
Section: Resultsmentioning
confidence: 99%
“…Small grains and even amorphous structure were observed in as-prepared thin CoCr layer films. 16 Secondly, it is caused by the inhomogeneous distribution of the composition in CoCr layers. This is because the position of the diffraction peak is strongly related to the composition.…”
Section: Methodsmentioning
confidence: 99%
“…Only few studies report on Co-Cr films synthesis with a thickness exceeding 1 mm. Among them, as in the case of CoNi, H c has been studied as a function of various parameters like film thickness [22], temperature [23,24] and stress [25]. But in addition, more attention was paid to characterize the intrinsic parameters of the CoCr layers beyond Hc.…”
Section: Introductionmentioning
confidence: 98%