“…6 Neural networks have been effectively utilised in characterising material processes, 7 capturing relationships between multiparameterised input patterns and material characteristics, 5,6 and constructing a calibration model of plasma diagnosis. 8 A principal component analysis (PCA) reduced OES was also used for neural network prediction of film properties. 9 An optimised neural network model was reported by combining OES, PCA, neural network and genetic algorithm.…”